Kubota Yusuke | Technology Development Center, Tokyo Electron Ltd., Tsukuba, Ibaraki 305-0841, Japan
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概要
- Kubota Yusukeの詳細を見る
- 同名の論文著者
- Technology Development Center, Tokyo Electron Ltd., Tsukuba, Ibaraki 305-0841, Japanの論文著者
関連著者
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KONDO Hiroki
Graduate School of Engineering, Nagoya University
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Hori Masaru
Graduate School Of Engineering Nagoya University
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Itoh Hitoshi
Technology Development Center Tokyo Electron Ltd.
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Takeda Keigo
Graduate School of Engineering, Nagoya University, Nagoya 464-8603, Japan
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Ishikawa Kenji
Graduate School of Engineering, Nagoya University, Nagoya 464-8603, Japan
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Toyoda Hirotaka
Graduate School of Engineering, Nagoya University, Nagoya 464-8603, Japan
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Kubota Yusuke
Technology Development Center, Tokyo Electron Ltd., Tsukuba, Ibaraki 305-0841, Japan
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Kashiwagi Yusaku
Technology Development Center, Tokyo Electron Ltd., Tsukuba, Ibaraki 305-0841, Japan
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Hori Masaru
Graduate School of Engineering, Nagoya University, Nagoya 464-8603, Japan
著作論文
- High H Radical Density Produced by 1-m-Long Atmospheric Pressure Microwave Plasma System
- High H Radical Density Produced by 1-m-Long Atmospheric Pressure Microwave Plasma System (Special Issue : Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials)