Amasaki Shinpei | Graduate School of Engineering, Nagoya University, Nagoya 464-8603, Japan

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概要

関連著者

KONDO Hiroki
Graduate School of Engineering, Nagoya University
Hori Masaru
Graduate School Of Engineering Nagoya University
Ishikawa Kenji
Graduate School of Engineering, Nagoya University, Nagoya 464-8603, Japan
Sekine Makoto
Graduate School of Engineering, Nagoya University, Nagoya 464-8603, Japan
Kang Song-Yun
Corporate Development Division, Tokyo Electron Ltd., Nirasaki, Yamanashi 407-0192, Japan
Sawada Ikuo
Corporate Development Division, Tokyo Electron Ltd., Nirasaki, Yamanashi 407-0192, Japan
Takeuchi Takuya
Graduate School of Engineering, Nagoya University, Nagoya 464-8603, Japan
Amasaki Shinpei
Graduate School of Engineering, Nagoya University, Nagoya 464-8603, Japan
Toyoda Hirotaka
Graduate School of Engineering, Nagoya University, Nagoya 464-8603, Japan

著作論文

Impacts of CF+, CF2+, CF3+, and Ar Ion Beam Bombardment with Energies of 100 and 400 eV on Surface Modification of Photoresist

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