Impacts of CF+, CF₂+, CF₃+, and Ar Ion Beam Bombardment with Energies of 100 and 400 eV on Surface Modification of Photoresist

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概要

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• Photoresists used in advanced ArF-excimer laser lithography are not tolerant enough for plasma etching processes. Degradation of photoresists during etching processes might cause not only low selectivity, but also line edge roughness (LER) on the sidewalls of etched patterns. For a highly accurate processing, it is necessary to understand the mechanisms of etching photoresists and to construct a new plasma chemistry that realizes a nano scale precise pattern definition. In this study, the modified layers formed on the surface of a photoresist by the bombardment of fluorocarbon ions of CF+, CF₂+, and CF₃+, and argon (Ar) ions were analyzed by X-ray photoelectron spectroscopy (XPS). The etching yield of the modified steady-state surface was almost dependent on the mass of incident ion species. The surface composition was modified with increasing dosage of each ion species, and reached a specific steady state that was dependent on the ion species. The bombardment of F-rich ion species such as CF₂+ and CF₃+ resulted in the formation of not only fluorocarbon layers, but also graphite like structures on the surface. On the basis of these results, the surface reaction for the ion-beam-induced modification was discussed.

• 2011-08-25

著者

• KONDO Hiroki

  Graduate School of Engineering, Nagoya University

• Hori Masaru

  Graduate School Of Engineering Nagoya University

• Ishikawa Kenji

  Graduate School of Engineering, Nagoya University, Nagoya 464-8603, Japan

• Sekine Makoto

  Graduate School of Engineering, Nagoya University, Nagoya 464-8603, Japan

• Kang Song-Yun

  Corporate Development Division, Tokyo Electron Ltd., Nirasaki, Yamanashi 407-0192, Japan

• Sawada Ikuo

  Corporate Development Division, Tokyo Electron Ltd., Nirasaki, Yamanashi 407-0192, Japan

• Takeuchi Takuya

  Graduate School of Engineering, Nagoya University, Nagoya 464-8603, Japan

• Amasaki Shinpei

  Graduate School of Engineering, Nagoya University, Nagoya 464-8603, Japan

• Toyoda Hirotaka

  Graduate School of Engineering, Nagoya University, Nagoya 464-8603, Japan

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