Properties of Indium--Zinc-Oxide Films Synthesized by Radio Frequency Magnetron Sputtering Based on Gas Phase Monitoring Using Multi-Micro Hollow Cathode Lamp

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概要

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• Indium--zinc-oxide (IZO) films were synthesized by radio frequency magnetron sputtering. In order to clarify the mechanisms of IZO film formation, the absolute densities of In and Zn atoms were measured simultaneously by absorption spectroscopy employing the multi-micro hollow cathode lamp. Their densities were measured to be 10^{9} to 10^{11} cm-3 and increased with pressure from 1 to 10 Pa. The density ratios of In to Zn in the gas phase corresponded to the ratios of film composition, and the relative amount of Zn atom increased with decreasing pressure. Carrier density increased with decreasing density ratio of In to Zn owing to the increase in the number of oxygen vacancies, which was clarified from the O 1s spectra obtained by X-ray photoelectron spectroscopy. A low resistivity of 10^{-6} \Omega m and an optical transmission of over 80% in the visible region were achieved at a pressure of 1 Pa.

• 2012-11-25

著者

• OHTA Takayuki

  Faculty of Systems Engineering, Wakayama University

• Hori Masaru

  Graduate School Of Engineering Nagoya University

• KANO Hiroyuki

  NU Eco-Engineering Co., Ltd.

• Ito Masafumi

  Faculty Of System Eng. Wakayama University

• Yamakawa Koji

  Katagiri Engineering Co. Ltd.

• Takeda Keigo

  Graduate School of Engineering, Nagoya University, Nagoya 464-8603, Japan

• Takashima Seigo

  Plasma Center for Industrial Applications, Nagoya Urban Industries Promotion Corporation, 2268-1 Anagahora, Shimoshidami, Moriyama-ku, Nagoya 463-0003, Japan

• Inoue Mari

  Graduate School of Systems Engineering, Wakayama University, Wakayama 640-8510, Japan

• Takota Naoki

  Graduate School of Systems Engineering, Wakayama University, Wakayama 640-8510, Japan

• Tsuchitani Shigeki

  Faculty of Systems Engineering, Wakayama University, Wakayama 640-8510, Japan

• Ito Masafumi

  Faculty of Science and Technology, Meijo University, Nagoya 468-8502, Japan

• Takashima Seigo

  Plasma Center for Industrial Applications, Nagoya Industries Promotion Corporation, Nagoya 463-0003, Japan

• Kano Hiroyuki

  NU Eco Engineering Co., Ltd., Miyoshi, Aichi 470-0201, Japan

• Ohta Takayuki

  Faculty of Science and Technology, Meijo University, Nagoya 468-8502, Japan

• INOUE Mari

  Graduate School of Human Development and Environment, Kobe University

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