Line-Profiles and Translational Temperatures of Pb Atoms in Multi-Micro Hollow Cathode Lamp Measured by Diode Laser Absorption Spectroscopy

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概要

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• The behaviors of Pb and metastable He atoms in the multi-micro hollow cathode lamp (multi-MHCL) at pressures of the order of kPa have been investigated by diode laser absorption spectroscopy. The pressure broadening effect for absorption line-profile was overlapped to Doppler profile and was estimated to be 0.26 MHz/Pa from line-profiles of metastable He atoms in the range from 5 to 10 kPa. The translational temperatures of metastable He atoms decreased from 830 to 410 K with increasing the pressure from 5 to 10 kPa. From line-profiles of Pb atoms, the temperatures and densities of Pb in the multi-MHCL were evaluated to decrease from 820 to 610 K and 9.0\times 10^{11} to 4.6\times 10^{11} cm-3 with increasing He pres sure from 4.9 to 7.4 kPa, respectively. The Lorentz broadenings was larger than those of He atom and the pressure dependence were estimated to be 0.22 MHz/Pa. The behaviors of emission intensities corresponded with those of atomic densities due to enhancement of sputtering. From these results, the multi-MHCL with line-profile guaranteed has been realized for measuring multi-metallic atom densities precisely.

• 2012-08-25

著者

• OHTA Takayuki

  Faculty of Systems Engineering, Wakayama University

• Hori Masaru

  Graduate School Of Engineering Nagoya University

• KANO Hiroyuki

  NU Eco-Engineering Co., Ltd.

• Yamakawa Koji

  Katagiri Engineering Co. Ltd.

• Takeda Keigo

  Graduate School of Engineering, Nagoya University, Nagoya 464-8603, Japan

• Takashima Seigo

  Plasma Center for Industrial Applications, Nagoya Urban Industries Promotion Corporation, 2268-1 Anagahora, Shimoshidami, Moriyama-ku, Nagoya 463-0003, Japan

• Inoue Mari

  Graduate School of Systems Engineering, Wakayama University, Wakayama 640-8510, Japan

• Takota Naoki

  Graduate School of Systems Engineering, Wakayama University, Wakayama 640-8510, Japan

• Tsuchitani Shigeki

  Faculty of Systems Engineering, Wakayama University, Wakayama 640-8510, Japan

• Ito Masafumi

  Faculty of Science and Technology, Meijo University, Nagoya 468-8502, Japan

• Takashima Seigo

  Plasma Center for Industrial Applications, Nagoya Industries Promotion Corporation, Nagoya 463-0003, Japan

• Kano Hiroyuki

  NU Eco Engineering Co., Ltd., Miyoshi, Aichi 470-0201, Japan

• Ohta Takayuki

  Faculty of Science and Technology, Meijo University, Nagoya 468-8502, Japan

• INOUE Mari

  Graduate School of Human Development and Environment, Kobe University

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