Low-Temperature Deposition of Zinc Oxide Film by Plasma-Assisted Mist Chemical Vapor Deposition (Special Issue : Dry Process)
スポンサーリンク
概要
著者
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Setsuhara Yuichi
Joining And Welding Research Institute Osaka University
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Takenaka Kosuke
Joining And Welding Research Institute Osaka University
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Okumura Yusuke
Joining and Welding Research Institute, Osaka University, Ibaraki, Osaka 567-0047, Japan
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