Kubota Kazuyoshi | Atr Adaptive Communications Research Laboratories

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著作論文

Large-Area and High-Speed Deposition of Microcrystalline Silicon Film by Inductive Coupled Plasma using Internal Low-Inductance Antenna
Effects of Antenna Size and Configurations in Large-Area RF Plasma Production with Internal Low-Inductance Antenna Units
Array of Micromachined Components Fabricated Using "Micro-Origami" Method
Low-Temperature Microcrystalline Silicon Film Deposited by High-Density and Low-Potential Plasma Technique Using Hydrogen Radicals
Self-Assembly of Microstage Using Micro-Origami Technique on GaAs

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