Influence of RF Power Supply on ElEctron-Cyclotron-Resonance Plasma with Mirror Confinement for SrTiO_3 Thin Film Formation
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2000-08-15
著者
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MIYAKE Shoji
Joining and Welding Research Institute, Osaka University
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Baba So
Joining And Welding Research Institute Osaka University
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Miyake Shoji
Joining & Welding Resarch Institute Osaka University
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