Millimeter-Wave Annealing of SrBi2Ta2O9 Films Prepared by Sol–Gel Method
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概要
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SrBi2Ta2O9 (SBT) films were prepared on Pt/Ti/SiO2/Si substrates by the sol–gel method, and they were annealed by 28 GHz millimeter-wave (mm-wave) irradiation and electric furnace heating. The mm-wave absorption measurement for each component of the substrate materials and the film indicated a selective heating of the film by the mm-wave. Films annealed with mm-waves had larger grains and smaller amounts of non-ferroelectric pyrochlore than those annealed using an electric furnace. These differences brought about a higher remanent polarization for the mm-wave-annealed films. Leakage current, fatigue and retention properties of films treated by the two methods were comparable.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2004-09-15
著者
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NUMATA Ken
Kanagawa High-Technology Foundation
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Saito Hidenori
Kanagawa Academy Of Science And Technology
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Miyake Shoji
Joining & Welding Resarch Institute Osaka University
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Matsumoto Takeshi
Joining And Welding Research Institute Osaka University
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Miyake Shoji
Joining and Welding Research Institute, Osaka University, 11-1 Mihogaoka, Ibaraki 567-0047, Japan
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Numata Ken
Kanagawa High-Technology Foundation, 3-2-1 Sakado, Takatsu-ku, Kawasaki 213-0012, Japan
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Saito Hidenori
Kanagawa High-Technology Foundation, 3-2-1 Sakado, Takatsu-ku, Kawasaki 213-0012, Japan
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