Temporal Behavior of Charged Particles in a Radio Frequency Afterglow Plasma Containing Negative Ions
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概要
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Temporal behavior of charged particles in pure He and He-SF_6 radio frequency (rf) afterglow plasmas has been experimentally clarified for various SF_6 gas concentratioras (1,25,50%). The electron density in the pure He plasma increased just after the rf power was switched off, unlike in a pure Ar plasma, and then decreased slowly. The increase was probably due to collisional ionization of metastable He atoms. The electron density in the He-SF_6 plasmas decreased exponentially. This was due to electron attachment to various molecules in the afterglow plasma.
- 社団法人応用物理学会の論文
- 1996-08-15
著者
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OHTSU Yasunori
Department of Electrical and Electronic Engineering, Graduate School of Science and Engineering, Sag
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FUJITA Hiroharu
Department of Electrical and Electronic Engineering, Saga University
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Ohtsu Yasunori
Department Of Electrical & Electronic Engineering Saga University
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SEKI Takuma
Department of Chemistry and Chemical Biology, Gunma University
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Fujita Hiroharu
Department Of Electrical And Electronic Engineering Saga University
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Fujita Hiroharu
Department Of Electrical Engineering Saga University
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Seki Takuma
Department Of Chemistry And Chemical Biology Gunma University
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Seki Takuma
Department Of Electrical Engineering Saga University
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Fujita Hiroharu
Department Of Electrical & Electronic Engineering Saga University
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