Energy Distribution Functions of Ions Impacted on a Negatively Biased Substrate in an Electron Cyclotron Resonance Microwave Plasma
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概要
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Impacted ion energy distribution functions (IIEDFs) in Ar electron cycltron resonance (ECR) microwave plasma have been measured on a substrate biased negatively using a conventional retarding grid analyzer. With an increasing ion-neutral elastic collision probability, the INEDFs were found to spread toward the low-energy side, forming two peaks. At the high collision probability (> 80%) realized at high biased-voltage and gas pressure, the lower-energy ions formed higher peaks than the higher-energy ones. This result was caused by the charge-exchange collision. The impacted ion temperature estimated from the semilog plot of the analyzer current-voltage characteristics was roughly constant (≃0.6 eV) for collision probability < 80%.
- 社団法人応用物理学会の論文
- 1999-07-30
著者
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OHTSU Yasunori
Department of Electrical and Electronic Engineering, Graduate School of Science and Engineering, Sag
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FUJITA Hiroharu
Department of Electrical and Electronic Engineering, Saga University
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Ohtsu Yasunori
Department Of Electrical & Electronic Engineering Saga University
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Fujita Hiroharu
Department Of Electrical And Electronic Engineering Saga University
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Mori Keiichi
Department of Electrical and Electronic Engineering, Saga University
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Mori Keiichi
Department Of Electrical And Electronic Engineering Saga University
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Fujita Hiroharu
Department Of Electrical & Electronic Engineering Saga University
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Ohtsu Yasunori
Department of Electrical and Electronic Engineering, Saga University
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