Time-Averaged Energy Distribution Function of Ions Impacted on an RF-biased Substrate in Electron Cyclotron Resonance Microwave Plasma

概要

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The time-averaged energy distribution function of ions (TIIEDFs) impacted on an rf-biased substrate has been measured by means of a conventional retarding energy analyzer in electron cyclotron resonance microwave plasma. It was observed that TIIEDFs have a bimodal profile at a wide range of frequency $f_{\text{b}}$ biased at the substrate. It was revealed that the energy difference between bimodal peaks in TIIEDFs increased with increasing $f_{\text{pi}}/f_{\text{b}}$ at $f_{\text{pi}}/f_{\text{b}}<1$, whereas it decreased with increasing $f_{\text{pi}}/f_{\text{b}}$ at $f_{\text{pi}}/f_{\text{b}}>1$, where $f_{\text{pi}}$ is the ion plasma frequency.
Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
2003-12-15