Modulation of Electron Velocity Distribution Function by Moving Cathode Sheath in a Low-Pressure rf Discharge
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1992-04-15
著者
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OHTSU Yasunori
Department of Electrical and Electronic Engineering, Graduate School of Science and Engineering, Sag
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FUJITA Hiroharu
Department of Electrical and Electronic Engineering, Saga University
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OKUNO Yoshihiro
Department of Energy Sciences, Tokyo Institute of Technology
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Okuno Y
Lsi Manufacturing Technology Unit Wafer Process Engineering Development Division Renesas Technology
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