Pt/Ba_xSr_<(1-x)>TiO_3/Pt Capacitor Technology for 0.15μm Embedded Dynamic Random Access Memory
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概要
- 論文の詳細を見る
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2004-05-15
著者
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Mori Yoshihiro
Ulsi Process Technology Development Center Matsushita Electronics Corporation
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Mori Yoshihiro
Ulsi Process Technology Development Center Semiconductor Company Matsushita Electronics Corp.
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TSUZUMITANI Akihiko
ULSI Process Technology Development Center, Semiconductor Company, Matsushita Electric Industrial Co
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Okuno Yasutoshi
Lsi Manufacturing Technology Unit Wafer Process Engineering Development Division Renesas Technology
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TSUNEMINE Yoshikazu
LSI Manufacturing Technology Unit, Wafer Process Engineering Development Division, Renesas Technolog
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OKUDAIRA Tomonori
LSI Manufacturing Technology Unit, Wafer Process Engineering Development Division, Renesas Technolog
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KASHIHARA Keiichiro
LSI Manufacturing Technology Unit, Wafer Process Engineering Development Division, Renesas Technolog
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YUTANI Akie
LSI Manufacturing Technology Unit, Wafer Process Engineering Development Division, Renesas Technolog
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SHINKAWATA Hiroki
LSI Manufacturing Technology Unit, Wafer Process Engineering Development Division, Renesas Technolog
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MAZUMDER Motaharul
LSI Manufacturing Technology Unit, Wafer Process Engineering Development Division, Renesas Technolog
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OHNO Yoshikazu
LSI Manufacturing Technology Unit, Wafer Process Engineering Development Division, Renesas Technolog
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YONEDA Masahiro
LSI Manufacturing Technology Unit, Wafer Process Engineering Development Division, Renesas Technolog
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OKUNO Yasutoshi
ULSI Process Technology Development Center, Semiconductor Company, Matsushita Electronics Corp.
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OGAWA Hisashi
ULSI Process Technology Development Center, Semiconductor Company, Matsushita Electronics Corp.
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Yutani Akie
Lsi Manufacturing Technology Unit Wafer Process Engineering Development Division Renesas Technology
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Shinkawata Hiroki
Lsi Manufacturing Technology Unit Wafer Process Engineering Development Division Renesas Technology
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Mazumder Motaharul
Lsi Manufacturing Technology Unit Wafer Process Engineering Development Division Renesas Technology
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Okuno Y
Lsi Manufacturing Technology Unit Wafer Process Engineering Development Division Renesas Technology
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