Formation of Cubic Boron Nitride Film on Si with Boron Buffer Layers

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1990-05-20

著者

• OSAKA Yukio

  Department of Electrical Engineering, Hiroshima University

• Okamoto Masaki

  Department of Respiratory Medicine, Tenri Hospital

• Okamoto M

  Osaka Univ. Osaka Jpn

• Okamoto Masaki

  Department Of Applied And Bioapplied Chemistry Graduate School Of Engineering Osaka City University

• Osaka Y

  Department Of Electrical Engineering Hiroshima-denki Institute Of Technology

• Osaka Y

  Hiroshima Kokusaigakuin Univ. Hiroshima Jpn

• Osaka Yukio

  Department Of Electrical Engineering Faculty Of Engineering Hiroshima University

• Yokoyama H

  Electrotechnical Lab. Ibaraki Jpn

• Okamoto M

  Department Of Electrical Engineering Osaka University

• YOKOYAMA Haruki

  Department of Electrical Engineering, Hiroshima University

• OSAKA Yukio

  Department of Electrical Engineering, Faculty of Engineering, Hiroshima University

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