Application of MoO_3 Electron Resist to Lift-Off Process

スポンサーリンク

概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1990-03-20

著者

• BABA Mamoru

  Department of Quantum Science and Energy Engineering, Tohoku University

• Ikeda Toshiaki

  Murata Mfg. Co. Ltd.

• Baba M

  Iwate Univ. Morioka

• Baba Mamoru

  Faculty Of Engineering Iwate University

• Baba M

  Department Of Electronic Engineering Faculty Of Engineering Iwate University

• Okamoto M

  Osaka Univ. Osaka Jpn

• IKEDA TOSHIO

  Department of Nephrology, Kantou-Teishin Hospital

• Baba M

  Univ. Tokyo Kashiwa Jpn

• Baba Mamoru

  Department Of Electrical And Electronic Engineering Iwate University

• OKAMOTO Masaaki

  Department of Oral Bacteriology, School of Dental Medicine, Turumi University

• Ikeda T

  Univ. Tsukuba Ibaraki Jpn

• Okamoto M

  Department Of Electrical Engineering Osaka University

• Okamoto Masaaki

  Department Of Oral Bacteriology School Of Dental Medicine Turumi University

• Ikeda Toshio

  Department Of Hypertension And Cardiorenal Medicine Dokkyo Medical University

• Ikeda Toshio

  Department Of Electronic Engineering Faculty Of Engineering Tohoku University

• Ikeda Toshio

  Department Of Chemistry Faculty Of Science Shizuoka University

• Ikeda Toshio

  Department Electronic Engineering Faculty Of Engineering Tohoku University

• Ikeda Toshio

  Department of Applied Chemistry, The University of Tokyo

関連論文

• Hydrothermal Synthesis of BaBe_2Si_2O_7 : Piezoelectrics
• Measurements of(n, xp), (n, xd)Double Differential Cross Sections of Carbon and Aluminum for 65 and 75 MeV Neutrons
• Effects of High Salt Intake on Hemodynamic Responses to Isometric Exercise in Normotensive Subjects and in Patients with Essential Hypertension : The 12th Conference on the Pathogenesis of Hypertension
• TISSUE CONTENTS OF WATER AND SODIUM IN 3 TYPES OF EXPERIMENTAL HYPERTENSIVE RATS : PROCEEDINGS OF THE 47th ANNUAL SCIENTIFIC MEETING OF THE JAPANESE CIRCULATION SOCIETY : Hypertension
• Effects of Norepinephrine Infusion on Systemic Hemodynamics and Plasma 6-Keto-Prostaglandin F1α in Normotensive Subjects and Patients with Essential Hypertension : THE 11th CONFERENCE ON THE PATHOGENESIS OF HYPERTENSION
• PLASMA CATECHOLAMINES AFTER INTRACEREBRO-VENTRICULAR INJECTION OF ANGIOTENSIN II IN RATS : Kidney・Hypertension : FREE COMMUNICATIONS (Abstract) : 45 Annual Scientific Meeting, Japanese Circulation Society
• LONG-TERM ANTIHYPERTENSIVE TREATMENT OF ESSENTIAL HYPERTENSION. OBSERVATIONS ON PATIENTS WHO WERE TREATED FOR MORE THAN TEN YEARS : SYMPOSIUM III : Diagnosis and Treatment
• A COMPARISON OF THE EFFECTS OF BETA BLOCKING AGENTS ON PLASMA RENIN ACTIVITY, RENIN SUBSTRATE, AND RENAL RENIN CONTENT IN RATS
• Pressor Responsiveness, Hemodynamics and Plasma Renin Activity in Essential Hypertension (3 Conference of Pathogenesis of Hypertension)
• BODY FLUID COMPOSITION AND HEMODYNAMICS IN ESSENTIAL HYPERTENSION WITH SPECIAL REFERENCE TO JUVENILE HYPERTENSION : PROCEEDINGS OF THE 38TH ANNUAL MEETING OF THE JAPANESE CIRCULATION SOCIETY
• STUDIES ON RISK FACTORS IN PATIENTS WITH ESSENTIAL HYPERTENSION : 1. SEVERITY SCORES AND INCIDENCE OF CARDIOVASCULAR COMPLICATIONS, AND 2. ANALYSIS OF CLINICAL PATTERNS AND OCCURRENCE OF CEREBRAL STROKE : (Part II)
• Nitrogen Isotope Separation by Means of Cation Exchange Resin, (I) Effects of Eluent Concentration
• Contact Ionization Ion Sources for Ion Cyclotron Resonance Separation ( Plasma Processing)
• Reflection-Induced Light Correlation in Spontaneous Emission in Front of a Mirror
• Laser Emission from Dye-Doped Small Spheres by Ultraviolet N_2 Laser Pumping
• ALTERED PHOSPHOLIPASE C ACTIVITY IN RENAL MEDULLA OF DOCA-SALT HYPERTENSIVE RATS
• Photoacoustic and Photoluminescence Spectra of Annealed 3,4,9,10-Perylenetetracarboxylic Dianhydride Films (Special Issue: Ultrasonic Electronics)
• Superimposed Emissions on Enhanced Green Emission from ZnO:Pr Powders by Evacuated Sealed Silica Tube Method
• Thermoelectric Properties of Amorphous Zinc Oxide Thin Films Fabricated by Pulsed Laser Deposition
• Photoacoustic Spectra of Heavily Co-Doped ZnO Powders
• Nonradiative Transition Processes Observed from Photoacoustic Spectra of ZnO Thin Films Fabricated by Pulsed Laser Deposition
• Substrate Dependence of Photoacoustic Spectra on 3, 4, 9, 10-Perylenetetracarboxylic Dianhydride (PTCDA) Films(Evaluation Methods and Characterization of Organic Materials)(Recent Progress in Organic Molecular Electronics)
• Estimation of Schottky Contacts to Porous Si by Photoacoustic Spectroscopy
• Temperature dependence of electrical properties of ambipolar organic transistors based on F16CuPc/α-sexithiophene p-n heterojunction (Special issue: Solid state devices and materials)
• Fabrication of ambipolar organic heterojunction transistors with various sexithiophene substituted derivatives (Special issue: Solid state devices and materials)
• Decay Time of 2.09 eV Luminescence of S^-Vacancy Centers and Their Optical and Thermal Stability in NaCl:S^2 Crystals
• PLASMA RENIN ACTIVITY AND PROGNOSIS OF ESSENTIAL HYPERTENSION
• HYPERTENSION WITH HYPERRENINEMIA APPARENTLY CAUSED BY DECREASED HEPATIC INACTIVATION OF RENIN : Proceedings of the 34th Annual Meeting of the Japanese Circulation Society (Part II)
• RENAL BIOPSY FINDINGS, DURATION OF HYPERTENSION AND RENIN RELEASE IN PATIENTS WITH ESSENTIAL HYPERTENSION
• 80. Bilateral Renal Venous Renin Activity after Stimulation of Renin Release in Patients with Renovascular Hypertension
• Effect of Hydralazine on Plasma Renin Activity in Hypertensive Patients : Part II
• Effect of Ganglion Blockade on Release of Renin in Man
• X-Ray Photoelectron Spectroscopy Study of Hetero-Interface between Manganese Pnictide and Mn-Zn Ferrite
• Epitaxial Growth of InAs on Single-Crystalline Mn-Zn Ferrite Substrates
• THE ACTIVITIES OF Ca^-STIMULATED, Mg^-DEPENDENT ATPase OF ERYTHROCYTE MEMBRANE IN PATIENTS WITH ESSENTIAL HYPERTENSION : Hypertension (III) : III : 48 Annual Scientific Meeting, Japanese Circulation Society
• Add-On Effect of Bedtime Dosing of the α_1-Adrenergic Receptor Antagonist Doxazosin on Morning Hypertension and Left Ventricular Hypertrophy in Patients Undergoing Long-Term Amlodipine Monotherapy
• Morning Rise of Blood Pressure Assessed by Home Blood Pressure Monitoring Is Associated with Left Ventricular Hypertrophy in Hypertensive Patients Receiving Long-Term Antihypertensive Medication
• Morning Rise in Blood Pressure Is a Predictor of Left Ventricular Hypertrophy in Treated Hypertensive Patients
• Effects of Antihypertensive Treatment on Platelet Function in Essential Hypertension
• Ceramic Resonators Using BGS Waves : SAW and Communication Device
• Frequency Trimming of ZnO/Glass SAW Filters : SAW and Communication Devices
• ROLES OF ENDOGENOUS VASODEPRESSOR PROSTAGLANDINS IN GROWTH OF VASCULAR SMOOTH MUSCLE CELLS IN SPONTANEOUSLY HYPERTENSIVE RATS
• Crystallization of Amorphous Oxides: Li_2O-GeO_2 : N: Noncrystal Materials
• Amorphous Dielectrics of Li_2O-Nb_2O_5 System : N: NONCRYSTAL MATERIALS
• Novel Nanofabrication Process for InAs/AlGaSb Heterostructures Utilizing Atomic Force Microscope Oxidation
• Coulomb Blockade Observed in InAs/AlGaSb Nanostructures Produced by an Atomic Force Microscope Oxidation Process
• Atomic Force Microscope Nanofabrication of InAs/AlGaSb Heterostructures ( Quantum Dot Structures)
• Selective Migration of Cd in Amorphous Cd-Sb Films
• Fabrication of Cu-Doped CdS Cell by an All-Evaporation Process and Its Photovoltaic Properties
• Photoconductive Decay Measurements on Semiconducting Black Phosphorus Crystals
• Photoconduction of Black Phosphorus in the Infrared Region
• The Polishing Effect of ZnO Thin Films on SAW Filters : SAW and Communication Devices
• Measurement of Prompt Fission Neutron Spectrum of Neptunium-237 for 0. 62 MeV Incident Neutrons
• Measurements of Double-Differential Neutron Emission Cross Sections of ^6Li, ^7Li and ^9Be for 11. 5 MeV and 18. 0 MeV Neutrons
• Two-Dimensional Anderson Localization in Black Phosphorus Crystals Prepaerd by Bismuth-Flux Method
• Effect of B-Ions Substitution in [(K_Bi_)-(Na_Bi_)](Ti-B)O_3 System with B=Zr, Fe_Nb_, Zn_Nb_ or Mg_Nb_
• B-Ion Substitution in (Pb-A)(Ti-B)O_3 Systems with A=Na_Bi_ or K_Bi_ and B=Zr, Fe_Nb_, Zn_Nb_, Mg_Nb_ or Mg_W_
• Piezoelectricity and Electrostriction in Ferroelectric Actuators
• Dynamical Structure Factors of Single-Walled Carbon Nanotubes by Means of Molecular Dynamics Calculation : Condensed Matter: Structure, etc.
• Probabilistic Cellular Automaton for Random Walkers : General Physics
• First Principles Study on Li Deintercalation Effect in Orthorhombic Li MnO_2 : Electrical Properties of Condensed Matter
• Pressure-Controlled Tight-Binding Molecular Dynamics Simulation of Carbon Nanotubes
• Formation of an S^-_2 Molecular Ion and Its Luminescence Characteristics in KCl:MnS Crystals
• ESR of an Mn^-S^ Complex Center in KCl Crystals
• Cellular Automaton Model for Biased Diffusive Traffic Flow
• Electrical Properties of Black Phosphorus Single Crystals Prepared by the Bismuth-Flux Method
• Analysis of ^Ni(n, α)Reaction Cross Sections with the Hauser-Feshbach Statistical Theory and the Bayesian Parameter Estimation Method
• Photoacoustic Spectra for Porous Silicon Using Piezoelectric Transducer and Microphone
• Effect of Thermal Annealing on Morphology of Pentacene Thin Films
• Measurement of Fast Neutron-Induced Fission Cross Section Ratio of Neptunium-237 relative to Uranium-235 between 6 and 120 keV
• Photochromic Properties of Sodium Halide Crystals Sensitized with Sulfur
• Luminescence and Coloration in Sulfur-Doped NaCl and NaBr Crystals
• Surface Acoustic Wave Binary Phase Shift Keying System for Time-Division Multiple Access
• Thermoluminescence and Optical Absorption of NaBr:S^ Crystals
• Fabrication of Au Fine Patterns by Ar Sputter Etching Using MoO_3 Mask
• Application of MoO_3 Electron Resist to Lift-Off Process
• Optical Properties of Black Phosphorus and Its Application to the Infrared Detector (SOLID STATE DEVICES AND MATERIALS 1)
• Growth and Optical Properties of Li_Nd(GeO_4)_4 Single Crystal
• MoO_3 Electron Resist and Its Application to Fabrication of Mo Fine Pattern
• Improvement of Electrochemical Capability of Sputtered Silicon Film Anode for Rechargeable Lithium Batteries
• Control of Nucleation Site and Growth Orientation of Bulk GaN Crystals
• Na : A New Flux for Growing Hexagonal Boron Nitride Crystals at Low Temperature
• Epitaxial Growth of AlN Thin Films on Sapphire by Pulsed Laser Deposition and Effect of N_2 Ambient on Crystallinity
• Optical and Mechanical Properties of Hard Hydrogenated Amorphous Carbon Films Deposited by Plasma CVD
• Formation of Cubic Boron Nitride Film on Si with Boron Buffer Layers
• High Resolution Measurements of Double Differential (n, α)Cross Sections of ^Ni and ^Ni between 4. 2 and 6. 5 MeV Neutrons
• Four-Body Breakup Process through the (^3He,^3H) Reaction on ^9Be
• The (^3He,α) Reaction on ^7Li from 5.0 to 8.0 MeV
• A New Inorganic Electron Resist Using Amorphous WO_3 Film
• Air-stable Ambipolar Organic Thin Film Transistors Based on Copper Pthalocyanince Composites
• High-Performance Air-Stable Ambipolar Organic Thin-Film Transistor Based on F16CuPc and CuPc
• Selective Masking Effects of WO_3 Resist on Impurity Diffusion and Oxidation in Silicon
• Radiative and Non-Radiative Processes of S^-Vacancy Centers and F-Center Formation in NaCl Crystals
• Effect of Thermal Annealing on Morphology of Pentacene Thin Films
• Fabrication of Au Microelectrodes with Photopolymerization of Triazine Dithiol Thin Films
• Fabrication of Ambipolar Organic Heterojunction Transistors with Various Sexithiophene Alkyl-Substituted Derivatives
• Correlation between Morphology and Electrical Properties of $\alpha$,$\alpha'$-Diethyl-sexithiophene Thin Films
• Temperature Dependence of Electrical Properties of Ambipolar Organic Transistors Based on F16CuPc/$\alpha$-Sexithiophene p–n Heterojunction
• Pressure-Controlled Tight-Binding Molecular Dynamics Simulation of Carbon Nanotubes
• Dependence of Ambipolar Transport on First Active Layer Thickness in Organic Homostructure Transistors

もっと見る 閉じる

スポンサーリンク