A New Inorganic Electron Resist Using Amorphous WO_3 Film
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概要
- 論文の詳細を見る
It was found that amorphous WO_3 films become insoluble in alkaline solutions after electron-beam irradiation. Exposure characteristics show that threshold doses required for this effect increase with increasing incident electron energy and film thickness. The blue coloration simultaneously obtained by electron-beam irradiation is not directly responsible for the change in the solubility. This inorganic electron resist has some advantageous features in resolution, contrast, resistance to heat and acid, and ease of the processing.
- 社団法人応用物理学会の論文
- 1981-02-05
著者
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BABA Mamoru
Department of Quantum Science and Energy Engineering, Tohoku University
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IKEDA TOSHIO
Department of Nephrology, Kantou-Teishin Hospital
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Baba Mamoru
Department Of Electrical And Electronic Engineering Iwate University
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Ikeda Toshio
Department Of Chemistry Faculty Of Science Shizuoka University
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Ikeda Toshio
Department Electronic Engineering Faculty Of Engineering Tohoku University
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