Optical and Mechanical Properties of Hard Hydrogenated Amorphous Carbon Films Deposited by Plasma CVD

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1990-12-20

著者

• OSAKA Yukio

  Department of Electrical Engineering, Hiroshima University

• Okamoto Masaki

  Department of Respiratory Medicine, Tenri Hospital

• Okamoto M

  Osaka Univ. Osaka Jpn

• Okamoto Masaki

  Department Of Applied And Bioapplied Chemistry Graduate School Of Engineering Osaka City University

• Osaka Y

  Department Of Electrical Engineering Hiroshima-denki Institute Of Technology

• Osaka Y

  Hiroshima Kokusaigakuin Univ. Hiroshima Jpn

• Osaka Yukio

  Department Of Electrical Engineering Faculty Of Engineering Hiroshima University

• Imura T

  Mitsubishi Paper Mills Ltd.

• Imura T

  Department Of Electrical Engineering Hiroshima University

• Yokoyama H

  Electrotechnical Lab. Ibaraki Jpn

• Okamoto M

  Department Of Electrical Engineering Osaka University

• YOKOYAMA Haruki

  Department of Electrical Engineering, Hiroshima University

• Takahiro K

  Tohoku University

• Takahiro Katsumi

  Department Of Electrical Engineering Hiroshima University

• YAMASAKI Toshifumi

  Department of Electrical Engineering, Hiroshima University

• IMURA Takeshi

  Mitsubishi Paper Mills Ltd.

• Yamasaki Toshifumi

  Department Of Electrical Engineering Hiroshima University

• OSAKA Yukio

  Department of Electrical Engineering, Faculty of Engineering, Hiroshima University

• Takahiro Katsumi

  Department of Chemistry and Materials Technology, Kyoto Institute of Technology, Matsugasaki, Sakyo-ku, Kyoto 606-8585, Japan

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