Substitutional Doping of a-Si_xN_<1-x> : H : III-1: AMORPHOUS FILMS
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1982-12-20
著者
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Kurata Hiroyuki
Department of Bioscience and Bioinformatics, Kyushu Institute of Technology
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Kurata Hiroyuki
Department Of Electrical Engineering Hiroshima University
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OSAKA Yukio
Department of Electrical Engineering, Hiroshima University
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MIYAMOTO Hironobu
Department of Electrical Engineering, Hiroshima University
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HIROSE Masataka
Department of Electrical Engineering, Hiroshima University
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Kurata Hiroyuki
Department Of Bioscience And Bioinformatics Kyushu Institute Of Technology
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Osaka Yukio
Department Of Electrical Engineering Hiroshima University
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Osaka Yukio
Department Of Electrical Engineering Faculty Of Engineering Hiroshima University
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Miyamoto Hironobu
Department Of Electrical Engineering Hiroshima University
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Hirose Masataka
Department Of Electrical Engineering Graduate School Of Advanced Sciences Of Matter Hiroshima Univer
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Hirose Masataka
Department Of Electrical Engineering Faculty Of Engineering Hiroshima University
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