Effects of Deposition Method on the Properties of Silicon Nitride and Silicon Oxynitride Films : Surfaces, Interfaces and Films

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1988-09-20

著者

• Hirao Takashi

  Central Research Laboratories Matsushita Electric Industrial Co. Ltd.

• Hiramatsu Takahiro

  Res. Inst. For Nanodevices Kochi Univ. Of Technol. 185 Miyanokuchi Tosayamada-cho Kami Kochi 782-850

• Hirao T

  Central Research Laboratories Matsushita Electric Industrial Co. Ltd.

• KAMADA Takeshi

  Central Research Laboratories, Matsushita Electric Industrial Co., Ltd.

• KITAGAWA Masatoshi

  Central Research Laboratories, Matsushita Electric Industrial Co., Ltd.

• WASA Kiyotaka

  Central Research Laboratories, Matsushita Electric Industrial Co., Ltd.

• TSUKAMOTO Kazuyoshi

  Central Research Laboratories, Matsushita Electric Industrial Co.,Ltd.

• YOSHIOKA Yoshiaki

  Central Research Laboratories, Matsushita Electric Industrial Co.,Ltd.

• KURAMASU Keizaburo

  Central Research Laboratories, Matsushita Electric Industrial Co.,Ltd.

• KORECHIKA Tetsuhito

  Central Research Laboratories, Matsushita Electric Industrial Co.,Ltd.

• TSUKAMOTO Kazuyoshi

  Matsushita Technoresearch Inc.

• Hirao T

  Research Institute For Nano-devices Kochi University Of Technology

• Wasa Kiyotaka

  Research Institute Of Innovative Technology For The Earth

• Kamada Takeshi

  Central Research Laboratories Matsushita Electric Industrial Co. Lid.

• Kitagawa M

  Matsushita Electric Ind. Co. Moriguchi Jpn

• Kitagawa M

  Matsushita Electric Industrial Co.

• Kitagawa M

  Central Research Laboratories Matsushita Electric Industrial Co. Ltd.

• Kitagawa Masatoshi

  Corporate Production Engineering Laboratories Matsushita Electric Ind.co. Ltd.

• Yoshioka Yoshiaki

  Central Research Laboratories Matsushita Electric Industrial Co. Ltd.:research And Development Labor

• Yoshioka Yoshiaki

  Matsushita Technoresearch Incorporation

• Kuramasu Keizaburo

  Central Research Laboratories Matsushita Electric Industrial Co. Ltd.:research And Development Labor

• Kitagawa Masatoshi

  Central Research Laboratories Matsushita Electric Ind. Co. Ltd.

• Korechika Tetsuhito

  Central Research Laboratories Matsushita Electric Industrial Co. Ltd.:research And Development Labor

• Wasa Kiyotaka

  Central Research Laboratories Matsushita Electric Industrial Co. Ltd.

• Tsukamoto K

  Ulsi Laboratory Mitsubishi Electric Corporation

• Hirao Takashi

  Central Research Laboratories Matsushita Electric Ind. Co. Ltd.

• Yoshioka Yoshiaki

  Central Research Laboratories , Matsushita Electric Industrial Co., Ltd.

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