Sugai Hideo | Department O Electrical Engineering Nagoya University
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概要
関連著者
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Sugai Hideo
Department of Electrical Engineering, Nagoya University
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Sugai Hideo
Department Of Electrical Engineering Faculty Of Engineering Nagoya University
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Toyoda Hirotaka
Department Of Electrical Engineering And Computer Science Nagoya University
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Toyoda Hirotaka
Department Of Electrical Engineering Nagoya University
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Sugai Hideo
Department Of Electrical Engineering School Of Engineering Nagoya Univeristy
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Toyoda H
Nagoya Univ. Nagoya Jpn
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Toyoda Haruhisa
Department Of Material Physics Faculty Of Engineering Science Osaka University
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Toyoda H
Department Of Electrical Engineering School Of Engineering Nagoya Univeristy
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菅井 秀郎
名古屋大
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菅井 秀郎
中部大学工学部電気システム工学科
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Nakamura Keiji
Department Of Electrical Electronics And Information Engineering Graduate School Of Engineering Osak
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菅井 秀郎
中部大学
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Nakamura Keiji
Department of Electrical Engineering, Nagoya University
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Ghanashev Ivan
Department Of Electrical Engineering Nagoya University
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永津 雅章
静岡大学創造科学技術大学院
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Nakamura K
Department Of Electrical Engineering School Of Engineering Nagoya University
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Nagatsu Masaaki
Department Of Electrical Engineering Graduate School Of Engineering Nagoya University
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菅井 秀郎
中部大学工学部
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Ghanashev Ivan
Department of Electrical Engineering, Nagoya University
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TAKEDA Susumu
Department of Electrical Engineering Nagoya University
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Yamauchi Takeshi
Corporate Manufacturing Engineering Center Toshiba Corporation
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Goto M
Matsushita Electric Industrial Co.
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OKUDA Takayoshi
Department of Electronics, Nagoya University
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Kitagawa M
Matsushita Electric Ind. Co. Moriguchi Jpn
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Kitagawa M
Matsushita Electric Industrial Co.
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Kitagawa M
Central Research Laboratories Matsushita Electric Industrial Co. Ltd.
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Kitagawa Masatoshi
Corporate Production Engineering Laboratories Matsushita Electric Ind.co. Ltd.
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GOTO Masashi
Matsushita Electric Industrial Co.
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Kitagawa Masatoshi
Central Research Laboratories Matsushita Electric Ind. Co. Ltd.
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Hikosaka Yukinobu
Department O Electrical Engineering Nagoya University:basic Process Development Division Fujitsu Ltd
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Okuda Takayoshi
Department Of Electrical Engineering Faculty Of Engineering Nagoya University
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菅井 秀郎
中部大学大学院工学研究科
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後藤 誠
北陸職業能力開発大学校
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Kokura Hikaru
Department of Electrical Engineering, Nagoya University
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Nishitani M
Matsushita Electric Ind. Co. Ltd. Kyoto Jpn
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Nishitani M
Matsushita Electric Industrial Co. Moriguchi Jpn
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Nishitani Mikihiko
Central Research Laboratories Matsushita Electric Industrial Co. Ltd.
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Nishitani Mikihiko
Central Research Laboratories Matsushita Electric Ind. Co. Ltd.
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KITAGAWA Masatoshi
Central Research Laboratories, Matsushita Electric Industrial Co., Ltd.
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GOTO Masashi
Department of General Medicine and Clinical Epidemiology, Kyoto University Graduate School of Medici
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Sugai Hideo
Department Of Electrical Engineering Graduate School Of Engineering Nagoya University
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Sugai Hideo
Nagoya University
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Ghanashev I
Nagoya Univ. Nagoya Jpn
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Nakamura Keiji
Department Of Electrical Engineering Nagoya University
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MORITA Shin
Department of Rehabilitation, Kagawa Medical University Hospital
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YAMAUCHI Takeshi
Corporate Manufacturing Engineering Center, TOSHIBA Corporation
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Morita Shigenori
Department Of Electronic Engineering Osaka University
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Toyoda Naoki
Nissin Inc.
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Morita Shin
Department Of Orthopedic Surgery Faculty Of Medicine Kagawa University
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Morita S
Department Of Electrical Engineering Nagoya University
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Nakano Tohru
Department Of Electrical Engineering Nagoya University
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Kokura Hikaru
Department Of Electrical Engineering Nagoya University
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Yamage Masashi
Department Of Electrical Engineering Faculty Of Engineering Nagoya University
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Hikosaka Y
Association Of Super-advanced Electronics Technologies (aset):(present Address)device Development Di
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IDO Kazuo
Department of Electrical Engineering,Nagoya University
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SUZUKI Keiji
Department of Molecular Medicine, Nagasaki University Graduate School of Biomedical Sciences
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Kojima Tetsuya
Department Of Computer Science Tokyo National College Of Technology
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Kojima Tetsuya
Department Of Biophysics And Biochemistry Graduate School Of Science University Of Tokyo
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Kojima Tetsuya
Department Of Electrical Engineering School Of Engineering Nagoya Univeristy
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Hirao Takashi
Central Research Laboratories Matsushita Electric Industrial Co. Ltd.
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KATO Takeshi
Department of Applied Physics, University of Miyazaki
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Hirao Takashi
Department Of Electrical Engineering Osaka University
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Nishitani Mikihiko
Matsushita Electric Industrial Co. Ltd. Osaka Jpn
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中村 僖良
東北大学大学院工学研究科
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Hiramatsu Takahiro
Res. Inst. For Nanodevices Kochi Univ. Of Technol. 185 Miyanokuchi Tosayamada-cho Kami Kochi 782-850
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Hirao T
Central Research Laboratories Matsushita Electric Industrial Co. Ltd.
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HIRAO Takashi
Matsushita Technoresearch Inc.
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Hirao T
Research Institute For Nano-devices Kochi University Of Technology
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NAKANO Tohru
Department of Physics, Chuo University
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Ahn Tae
On Leave From Semiconductor R&d Center Samsung Electronics Co. Ltd.
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Sugai Hideo
Department Of Electrical Engineering Nagoya University
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Sugai Hideo
Department Of Electrical Engineering School Of Engineering Nagoya University
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Suzuki K
School Of Science And Engineering Waseda University:kagami Memorial Laboratory For Materials Science
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Kikuchi K
Department Of Chemistry Tokyo Metropolitan University
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Nakamura Keiji
Department Of Electrical Engineering School Of Engineering Nagoya University
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Kikuchi Kazuo
Department Of Electrical Engineering Nagoya University
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Sato Masanori
Department of Earth and Environmental Sciences, Faculty of Science, Kagoshima University
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MITSUOKA Yoshihito
Department of Electrical Engineering, Nagoya University
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Suzuki K
Ntt Transmission Systems Laboratories Lightwave Communications Laboratory
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Suzuki K
Assoc. Super‐advanced Electronics Technol. Kanagawa Jpn
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Nakamura K
Tokyo Electron Ltd. Tokyo Jpn
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YAMAGE Masashi
Nagoya University
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GOSHIMA Kazutomo
Department of Electrical Engineering, School of Engineering, Nagoya University
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YAMAZOE Hiroshi
Matsushita Electric Industrial Co.
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Nagatsu Masaaki
Department Of Electrical Engineering Nagoya University
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HIKOSAKA Yukinobu
Department of Electrical Engineering, Nagoya University
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Hanami Atsuo
Department of Electrical Engineering, Faculty of Engineering Nagoya University
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Yamage Masashi
Department of Electrical Engineering, Faculty of Engineering Nagoya University
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ABDEL-FATTAH Essam
Department of Electrical Engineering, Graduate School of Engineering, Nagoya University
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Kishimoto Shigeru
Department Of Quantum Engineering School Of Engineering Nagoya University
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Kishimoto Shigeru
Department Of Electrical Engineering Faculty Of Engineering Nagoya University
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Mitsuoka Yoshihito
Department Of Electrical Engineering Nagoya University:research Laboratories Nippondenso Co. Ltd.
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Shirakawa Teruyuki
Department Of Electrical Engineering Nagoya University
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Nishitani Mikihiko
Matsushita Electric Industrial Co.
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Okuda Taichi
Department Of Material Physics Faculty Of Engineering Science Osaka University
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Toyoda Hirotaka
Department Of Electrical Engineering School Of Engineering Nagoya University
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Suzuki K
Department Of Information And Communication Technology Tokai University
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Michelsen P
Association Euratom-risφ National Laboratory Risφ
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Hanami Atsuo
Department Of Electrical Engineering Faculty Of Engineering Nagoya University
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永津 雅章
静岡大 創造科学技術大学院
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Nakano T
Kitasato Univ. Tokyo Jpn
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Kokura H
Nagoya Univ. Nagoya Jpn
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Kojima T
Department Of Electrical Engineering School Of Engineering Nagoya Univeristy
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Kando Masashi
Department Of Electrical Engineering Nagoya University
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Ikezawa S
Prof. Ikezawa Lab Department Of Electrical Engineering Chubu University
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Sato Noriyoshi
Department Of Electrical Engineering Tohoku University
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Tanaka Hideyuki
Department of Cardiology, Nihon University Surugadai Hospital
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Yoneda Shinichi
Department of Electrical Engineering, Nagoya University
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Mitsuhira Noriyuki
Sumitomo Metal Industries Co., Ltd.
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Nakamura Moritaka
Fujitsu Co., Ltd.
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ITO Satoshi
Department of Pharmacology, Tohoku University Graduate School of Medicine
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NODA Nobuaki
Plasma Physics Laboratory, Kyoto University
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WATANABE Masahiro
Department of Information Processing, Tokyo Institute of Technology
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WINTER Jorg
Institut fur Plasmaphysik der Kernforschungsanlage
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MIMA Kunioki
Institute of Laser Engineering, Osaka University
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Collins G
Colorado State Univ. Colorado Usa
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Chen Changchuan
Department Of Electrical Engineering And Computer Science Nagoya University
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豊田 浩孝
Department Of Electrical Engineering Nagoya University
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Watanabe M
Hiroshima Univ. Higashi‐hiroshima Jpn
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Collins George
Dept. Of Electrical Engineering Colorado State University
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Iwata Satoshi
Department Of Electrical Engineering Faculty Of Engineering Nagoya University
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Mima Kunioki
Institue Of Laser Engineering Osaka University
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Takagi Yusuke
Department Of Cardiovascular Medicine Tohoku University Graduate School Of Medicine
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Noda N
Kyoto Univ. Uji Jpn
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Noda Nobuaki
Plasma Physics Laboratory Kyoto University
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KITAGAWA Masatoshi
Matsushita Electric Industrial Co., Ltd.
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OHKUBO Michiko
Department of Astronomy, Faculty of Science, Kyoto University
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NAKAMURA Moritaka
Basic Process Development Div.
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NIKI Hiroshi
Department of Oto-Laryngology,School of Medicine,Tokushima University
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YABUOSHI Noriyuki
Department of Electrical Engineering, Nagoya University
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YAMASHITA Yuhji
Department of Electrical Engineering, Nagoya University
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SHIRAKAWA Teruyuki
Department of Electrical Engineering, Nagoya University
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Watanabe Mahiko
Department Of Applied Physics And Chemistry Faculty Of Engineering Hiroshima University
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Niki Hiroshi
Department Of Agricultural Chemistry Hokkaido University
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Niki Hiroshi
Department Of Electrical Engineering Nagoya University
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Ito Akira
Department Of Biochemistry And Molecular Biology School Of Pharmacy Tokyo University Of Pharmacy And
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Ito Akira
Department Of Electrical Engineering Graduate School Of Engineering Nagoya University
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AHN Tae
Department of Electrical Engineering, Nagoya University
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Kojima Hiroaki
Department Of Electrical Engineering Nagoya University
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Hirose Shunichi
Department Of Electrical Engineering Nagoya University
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URANO Shuichi
Department of Electrical Engineering, Nagoya University
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AMEMIYA Susumu
Department of Nuclear Engineering, Nagoya University
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ISHIKAWA Kazuyuki
Department of Nuclear Engineering, Nagoya University
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Yamashita Yuhji
Department Of Electrical Engineering Nagoya University
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Hatta Yoshisuke
Department Of Electranic Engineering Tohohu University
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IKEZAWA Shunjiro
Department of Electronic Engineering, College of Engineering, Chubu University
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OGIWARA Norio
Japan Atomic Energy Research Institute, Naka Fusion Research Establishment
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OHISHI Akihiro
Department of Electrical Engineering, School of Engineering, Nagoya Univeristy
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NISHITANI Mikihiko
Display Device Development Center, Matsushiita Electric Industrial Co.
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YAMAZOE Hiroshi
Display Device Development Center, Matsushiita Electric Industrial Co.
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COLLINS George
Department of Electrical Engineering, Colorado State University
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Watanabe M
Nec Corp. Ibaraki Jpn
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TERADA Mamoru
Department of Parasitology, Hamamatsu University School of Medicine
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IHDE Jorg
Institut fur Plasmaphysik, Forschungszentrum Julich GmbH, EURATOM Association, Trilateral Euregio Cl
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Yoneda Shinichi
Department Of Electrical Engineering Nagoya University
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Shaw Denis
Department of Electrical Engineering, Colorado State University
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Shaw Denis
Dept. of Electrical Engineering, Colorado State University
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Yabuoshi Noriyuki
Department Of Electrical Engineering Nagoya University
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Nakamura Moritaka
Basic Process Development Division Fujitsu Ltd.
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Nakamura Moritaka
Fujitsu Co. Ltd.
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Mitsuhira Noriyuki
Sumitomo Metal Industries Co. Ltd.
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Nishitani Mikihiko
Display Device Development Center Matsushita Electrics Industrial Co. Ltd.
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Kitagawa Masatoshi
Matsushita Electric Industrial Co.
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Ihde Jorg
Institut Fur Plasmaphysik Forschungszentrum Julich Gmbh Euratom Association Trilateral Euregio Clust
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Shaw Denis
Dept. Of Electrical Engineering Colorado State University
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Sugai Hideo
Department Of Electrical Nagoya University
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Winter Jorg
Institut Fur Experimentalphysik Ii Ruhr-universitat Bochum
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Somiya Satoru
Department Of Electrical Engineering And Computer Science School Of Engineering Nagoya University
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Terada Mamoru
Department Of Electrical Engineering Nagoya University
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Urano Shuichi
Department Of Electrical Engineering Nagoya University
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Ogiwara N
Japan Atomic Energy Research Institute Naka Fusion Research Establishment
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Kanoh M
Corporate Manufacturing Engineering Center Toshiba Corporation
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Yamage Masashi
Manufacturing Research Center Toshiba Co. Ltd.
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Yamage Masashi
Department Of Electrical Engineering Nagoya University
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Ohishi A
Japan Advanced Inst. Of Sci. And Technol. Tatsunokuchi Jpn
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Collins George
Department Of Electrical Engineering Colorado State University
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Suzuki K
東京大学大学院農学生命科学研究科獣医病理学研究室
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Ohkubo Michiko
Department Of Astronomy Faculty Of Science Kyoto University
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Ohkubo Michiko
Toshiba Research And Development Center
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Amemiya Susumu
Department Of Nuclear Engineering Nagoya University
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Noda N
Plasma Physics Laboratory Kyoto University
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SAIDOH Masahiro
Naka Fusion Research Establishment, Japan Atomic Energy Research Institute
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IIO Makoto
Department of Electrical Engineering, School of Engineering, Nagoya University
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Ichihara Katsutaro
Toshiba Corporation Materials And Devices Laboratory
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Ichihara Katsutaro
Toshiba Research And Development Center
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IMURA Tomonori
Department of Electrical Engineering, Faculty of Engineering, Nagoya University
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Xu G
Anelva Corp. Tokyo Jpn
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Shirakawa T
School Of Social Information Studies Otsuma Women's University
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Nakamura Kenji
Department Of Anatomy Graduate School Of Medicine Osaka City University
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Toyoda Hirotaka
Plasma Nanotechnology Research Center Nagoya University
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Imura Tomonori
Department Of Electrical Engineering Faculty Of Engineering Nagoya University
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Hotta Yoshihiko
Department Of Electrical Engineering And Computer Science School Of Engineering Nagoya University
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Saidoh M
Naka Fusion Research Establishment Japan Atomic Energy Research Institute
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SEGI Kazunori
Department of Electrical Engineering, School of Engineering, Nagoya University
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HASEGAWA Isahiro
Procurement Division, Semiconductor Company, Toshiba Corporation
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Noda N
National Institute For Fusion Science
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XU Ge
Department of Electrical Engineering, Nagoya University
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KANOH Masaaki
Manufacturing Research Center, Toshiba Co. Ltd.
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KAKO Hidenori
Department of Electrical Engineering, Nagoya University
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Okuda Takayoshi
Department Of Electrical Engineering Nagoya University
著作論文
- Dechuck Operation of Coulomb Type and Johnsen-Rahbek Type of Electrostatic Chuck Used in Plasma Processing
- Plasma Absorption Probe for Measuring Electron Density in an Environment Soiled with Processing Plasmas
- Diagnostic of Surface Wave Plasma for Oxide Etching in Comparison with Inductive RF Plasma
- Electron-Impact Dissociation of Methane into CH_3 and CH_2 Radicals : II. Absolute Cross Sections
- Electron-Impact Dissociation of Methane into CH_3 and CH_2 Radicals : I. Relative Cross Sections
- Dissociative Ion Yields on Metal Surfaces Bombarded with Low-Energy Fluorocarbon Ions
- Observation of Ion Scattering from Metal Surfaces Bombarded with Low-Energy Hydrocarbon Ions
- Generation of a Large Electron Beam for Plasma Processing
- Formation of CH Radical by Surface Bombardment in a Methane/Argon DC Discharge
- RF Plasma Production at Ultralow Pressures with Surface Magnetic Confinement
- Space- and Time-Resolved Measurements of Negative Ions in a Pulsed Inductively-Coupled Plasma in Chlorine
- A New Technology for Negative Ion Detection and the Rapid Electron Cooling in a Pulsed High-Density Etching Plasma
- Hydrogen-Reduced Carbonization by Acetylene Discharges
- Wall Heating Effect on Crystallization of Low-Temperature Deposited Silicon Films from an Inductuvely-Coupled Plasma
- Lower Temperature Deposition of Polycrystalline Silicon Films from a Modified Inductively Coupled Silane Plasma
- LOW-TEMPERATURE FORMATION OF poly-Si FILMS BY INDUCTIVELY-COUPLED SILANE PLASMA
- Drastic Change in CF_2 and CF_3 Kinetics Induced by Hydrogen Addition into CF_4 Etching Plasma
- Spatial Distribution and Surface Loss of CF_3 and CF_2 Radicals in a CF_4 Etching Plasma
- Radial Density Profile of Microwave Plasma for Wall Conditioning in a Purely Toroidal Magnetic Field (小特集 粒子・熱制御とプラズマ対向材料研究の進展--IEA/TEXTOR共同研究の成果と現状)
- High Speed Cleaning of Boronized Wall with a CF_4 Containing Plasma
- Rapid Cleaning of Boronized Walls with a Chlorine/Hydrogen Glow Discharge
- A Radio Frequency Driven DC Electron Beam Source
- Dramatic Improvement of Surface Wave Plasma Performance Using a Corrugated Dielectric Plate : Nuclear Science, Plasmas, and Electric Discharges
- Dependence of Fluorocarbon Plasma Chemistry on the Electron Energy Distribution Function
- Mode Conversion and Electron Heating by Oblique Injection of the Ordinary Mode into Over-Dense Plasma
- Electron Heating by Oblique Injection of Ordinary Mode into Overdense Plasma
- Lower-Temperature Growth of Hydrogenated Amorphous Silicon Films from Inductively Coupled Silane Plasma
- Simple Direct Monitoring of SiH_3 Radical and Particulates in a Silane Plasma with Ultraviolet Transmission Spectroscopy
- Cross Section Measurements for Electron-Impact Dissociation of CHF_3 into Neutral and Ionic Radicals
- Cross Sections for Electron-Impact Dissociation of Alternative Etching Gas, C_3HF_7O
- Test-Wave Measurements of Microwave Absorption Efficiency in a Planar Surface-Wave Plasma Reactor
- Production of Low-Pressure Planar Non-Magnetized Plasmas Sustained under a Dielectric-Free Metal-Plasma Interface
- Production and Control of Low-Pressure Ar and CF_4 Plasmas Using Surface Waves
- Cross Section Measurements for Electron-Impact Dissociation of C_4F_8 into Neutral and Ionic Radicals
- High-Speed Etching of Indium-Tin-Oxide Thin Films Using an Inductively Coupled Plasma ( Plasma Processing)
- Design of Large-Area Surface Wave Plasma Excited by Slotted Waveguide Antennas with Novel Power Divider
- Whistler Wave Trapping in a Narrow Density Trough
- Observation of Transit-Time Electron Heating by Localize RF Field
- Transit-Time RF Heating of Plasma Based on Fermi Acceleration
- Dispersion and Attenuation of Whistler Waves in a Finite Plasma
- A New Approach to Boronization of Fusion Devices
- Two-Dimensional Modeling of Slot-Excited Surface Waves in Bounded Planar Plasmas
- Radical Control by Wall Heating of a Fluorocarbon Etching Reactor
- Absolute Fluorine Atom Densities in Fluorocarbon High-Density Plasmas Measured by Appearance Mass Spectrometry
- Negative Ion Transfer Model of Low-Temperature Oxidation of Silicon Surface by High-Density Microwave Plasma
- Optical Emission and Microwave Field Intensity Measurements in Surface Wave-Excited Planar Plasma
- Pressure Dependence of Carbon Film Coating by a Toroidal Methane Discharge
- Free Radicals in an Inductively Coupled Etching Plasma
- Excitation of Azimuthally Propagating Ion-Cyclotron Drift Waves in Large Magnetized Plasma : Nuclear Science, Plasmas and Electric Discharges
- Ion Cyclotron Drift Waves in Plasmas with Controlled Radial Density Distributions
- Plasma Oscillation Method for Measurements of Absolute Electron Density in Plasma
- Mechanism of Cross-Field Heating of Ions
- Wall Temperature Dependence of Boronization Using Decaborane and Diborane
- Resonant Directional Excitation of Helicon Waves by a Helical Antenna
- Hot Spots and Electron Heating Processes in a Helicon-Wave Excited Plasma
- Low-Frequency Electrostatic Waves in a Weakly Ionized Plasma under a Weak Magnetic Field
- Radical Kinetics in a Fluorocarbon Etching Plasma
- RECENT DEVELOPMENT OF HIGH-DENSITY PLASMA SOURCES FOR SEMICONDUCTOR PROCESSING
- Partial Cross Sections for Electron Impact Dissociation of CF_4 into Neutral Radicals
- INFLUENCE OF ION-INDUCED RADICAL DESORPTION FROM FLUOROCARBON DEPOSITS IN A HIGH DENSITY PLASMAS
- Surface Wave Eigenmodes in a Finite-Area Plane Microwave Plasma
- External Excitation of Space Charge Waves in RF Discharges
- Modeling Microwave Resonance of Curling Probe for Density Measurements in Reactive Plasmas
- Characteristics of Ultrahigh-Frequency Surface-Wave Plasmas Excited at 915 MHz
- Novel Antenna Coupler Design for Production of Meter-Scale High-Density Planar Surface Wave Plasma
- Low Temperature Growth of Amorphous and Polycrystalline Silicon Films from a Modified Inductively Coupled Plasma
- New Inductive rf Discharge Using an Internal Metal Antenna
- Electrostatic Coupling of Antenna and the Shielding Effect in Inductive RF Plasmas
- Effect of Sputtering Deposition Process on Magnetic Properties of Magnetic Multilayers
- Suppression of Oxygen Impurity Incorporation into Silicon Films Prepared from Surface-Wave Excited H2/SiH4 Plasma
- Suppression of High-Energy Backscattered Particles in Magnetron Plasma Using Cylindrical Cathode
- Dependences of Giant Magnetoresistance in Co/Cu Multilayers on Sputtering Conditions
- Electron Density Range Measurable by Microwave Resonator Probe with Higher Mode Resonance
- Cross Section Measurements for Electron-Impact Dissociation of C 4F 8 into Neutral and Ionic Radicals
- Opto-Curling Probe for Simultaneous Monitoring of Optical Emission and Electron Density in Reactive Plasmas
- Mode Jumps and Hysteresis in Surface-Wave Sustained Microwave Discharges
- Mechanism of Oxidation of Si Surfaces Exposed to O2/Ar Microwave-Excited Plasma
- Multi-Hollow Plasma Production along Dielectric Plate in Microwave Discharge
- Plasma Effects on Electrostatic Chuck Characteristics on Capacitive RF Discharge
- Influence of Excitation Frequency on the Electron Distribution Function in Capacitively Coupled Discharges in Argon and Helium
- Temporal Analysis of Electrostatic Chuck Characteristics in Inductively Coupled Plasma
- Negative Ion Transfer Model of Low-Temperature Oxidation of Silicon Surface by High-Density Microwave Plasma
- Hydrogen Release and Retention Dynamics of Amorphous Carbon Layers Exposed to a Hydrogen/Helium Plasma