Cross Section Measurements for Electron-Impact Dissociation of C_4F_8 into Neutral and Ionic Radicals
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概要
- 論文の詳細を見る
- Publication Office, Japanese Journal of Applied Physics, Faculty of Science, University of Tokyoの論文
- 1997-06-01
著者
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Sugai Hideo
Department of Electrical Engineering, Nagoya University
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Toyoda Hirotaka
Department Of Electrical Engineering Nagoya University
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Sugai Hideo
Department Of Electrical Engineering Faculty Of Engineering Nagoya University
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Sugai Hideo
Department Of Electrical Engineering School Of Engineering Nagoya University
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Toyoda Hirotaka
Department Of Electrical Engineering And Computer Science Nagoya University
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Toyoda Hirotaka
Department Of Electrical Engineering School Of Engineering Nagoya University
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IIO Makoto
Department of Electrical Engineering, School of Engineering, Nagoya University
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Sugai Hideo
Department O Electrical Engineering Nagoya University
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Iio Makoto
Department Of Electrical Engineering School Of Engineering Nagoya University
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