Optical Emission and Microwave Field Intensity Measurements in Surface Wave-Excited Planar Plasma
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概要
- 論文の詳細を見る
A large-planar (22 cm diam.) high-density (〜 2×10^<12> cm^<-3>) plasma is produced in argon gas at 140 Pa by 2.45 GHz-1 kW discharges, using a microwave launcher of small slot antennas. The two-dimensional distributions of optical emission intensities as well as microwave field intensities are measured near the plasma surface irradiated with microwaves. Both the optical emission and the microwave field clearly show stationary patterns of azimuthal mode m = 3 and radial mode n = 3 at higher pressures (140 Pa), while a mode change to m : 6 and n = 2 is observed at lower pressures (44 Pa). These patterns are attributed to the excitation and absorption of standing surface waves near the cutoff layer.
- 社団法人応用物理学会の論文
- 1996-03-01
著者
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Sugai Hideo
Department of Electrical Engineering, Nagoya University
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永津 雅章
静岡大学創造科学技術大学院
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Sugai Hideo
Department Of Electrical Engineering School Of Engineering Nagoya Univeristy
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Sugai Hideo
Department Of Electrical Engineering Faculty Of Engineering Nagoya University
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Nagatsu Masaaki
Department Of Electrical Engineering Graduate School Of Engineering Nagoya University
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Kanoh M
Corporate Manufacturing Engineering Center Toshiba Corporation
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Yamage Masashi
Manufacturing Research Center Toshiba Co. Ltd.
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Xu G
Anelva Corp. Tokyo Jpn
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XU Ge
Department of Electrical Engineering, Nagoya University
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KANOH Masaaki
Manufacturing Research Center, Toshiba Co. Ltd.
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Sugai Hideo
Department O Electrical Engineering Nagoya University
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Nagatsu Masaaki
Department of Electrical and Electronic Engineering, Faculty of Engineering, Shizuoka University, Hamamatsu 432-8561, Japan
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Xu Ge
Department of Electrical Engineering, Faculty of Engineering, Nagoya University,
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