VHF帯軸対称表面波を用いた大面積プラズマの基礎特性

概要

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Development of new type of surface-wave-produced plasma(SWP)apparatus employing a liner coaxial antenna, into which an RF power of 900W at 149MHz in VHF band was launched, is reported. In order to understand the basic characteristics, we calculated the profiles of electric and magnetic field strengths using finite-element-method(FEM). From the calculations, it is found that there are many eigen modes of electric and magnetic fields, and that some of them indicate surface waves propagating on the antenna surface in consequence of the comparison between the calculated profiles and measured ones of field strengths. As for its application, we produced a large area plasma of 40cm diameter with the density uniformity of ±5% by winding the antenna into a spiral coil. On account of coaxial antenna, a remarkable advantage is that the form of the antenna, that is, the area of plasma can be varied flexibly by bending the antenna.
社団法人プラズマ・核融合学会の論文
1998-12-25