High-Speed Etching of Indium-Tin-Oxide Thin Films Using an Inductively Coupled Plasma (<Special Issue> Plasma Processing)
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1994-07-30
著者
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Nakamura Keiji
Department of Electrical Engineering, Nagoya University
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Sugai Hideo
Department of Electrical Engineering, Nagoya University
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Sugai Hideo
Department Of Electrical Engineering Faculty Of Engineering Nagoya University
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Nakamura Keiji
Department Of Electrical Electronics And Information Engineering Graduate School Of Engineering Osak
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OHKUBO Michiko
Department of Astronomy, Faculty of Science, Kyoto University
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Ohkubo Michiko
Department Of Astronomy Faculty Of Science Kyoto University
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Ohkubo Michiko
Toshiba Research And Development Center
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Ichihara Katsutaro
Toshiba Corporation Materials And Devices Laboratory
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Ichihara Katsutaro
Toshiba Research And Development Center
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IMURA Tomonori
Department of Electrical Engineering, Faculty of Engineering, Nagoya University
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Imura Tomonori
Department Of Electrical Engineering Faculty Of Engineering Nagoya University
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Sugai Hideo
Department O Electrical Engineering Nagoya University
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Nakamura Keiji
Department Of Biology And Geosciences Graduate School Of Science Osaka City University:present Addre
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Nakamura Keiji
Department Of Electrical Engineering Faculty Of Engineering Nagoya University
関連論文
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- Dependences of Giant Magnetoresistance in Co/Cu Multilayers on Sputtering Conditions
- High-Dispersion Spectra Collection of Nearby F-K Stars at Okayama Astrophysical Observatory : A Basis for Spectroscopic Abundance Standards
- Electron-Impact Dissociation of Methane into CH_3 and CH_2 Radicals : II. Absolute Cross Sections
- Electron-Impact Dissociation of Methane into CH_3 and CH_2 Radicals : I. Relative Cross Sections
- Dissociative Ion Yields on Metal Surfaces Bombarded with Low-Energy Fluorocarbon Ions
- Observation of Ion Scattering from Metal Surfaces Bombarded with Low-Energy Hydrocarbon Ions
- Generation of a Large Electron Beam for Plasma Processing
- Formation of CH Radical by Surface Bombardment in a Methane/Argon DC Discharge
- RF Plasma Production at Ultralow Pressures with Surface Magnetic Confinement
- Analytical Expression Based Design of a Low-Voltage FD-SOI CMOS Low-Noise Amplifier(Analog Circuit Techniques and Related Topics)
- Small-Signal and Noise Model of Fully Depleted Silicon-on-Insulator Metal-Oxide-Semiconductor Devices for Low-Noise Amplifier
- Space- and Time-Resolved Measurements of Negative Ions in a Pulsed Inductively-Coupled Plasma in Chlorine
- A New Technology for Negative Ion Detection and the Rapid Electron Cooling in a Pulsed High-Density Etching Plasma
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- LOW-TEMPERATURE FORMATION OF poly-Si FILMS BY INDUCTIVELY-COUPLED SILANE PLASMA
- Drastic Change in CF_2 and CF_3 Kinetics Induced by Hydrogen Addition into CF_4 Etching Plasma
- Spatial Distribution and Surface Loss of CF_3 and CF_2 Radicals in a CF_4 Etching Plasma
- Two-Dimensional Distributions of Ti and Ti^+ Densities in High-Pressure Magnetron Sputtering Discharges
- Radial Density Profile of Microwave Plasma for Wall Conditioning in a Purely Toroidal Magnetic Field (小特集 粒子・熱制御とプラズマ対向材料研究の進展--IEA/TEXTOR共同研究の成果と現状)
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- A Radio Frequency Driven DC Electron Beam Source
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- Production of Low-Pressure Planar Non-Magnetized Plasmas Sustained under a Dielectric-Free Metal-Plasma Interface
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- Cross Section Measurements for Electron-Impact Dissociation of C_4F_8 into Neutral and Ionic Radicals
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- Experimental Examination of an Overwrite Method Utilizing Leakage Field Modulation by the Laser Power Level
- Spectroscopic Study on the Atmospheric Parameters of Nearby F-K Dwarfs and Subgiants
- Spectroscopic Determination of Stellar Atmospheric Parameters : Application to Mid-F through Early-K Dwarfs and Subgiants
- Abundance Analyses of 12 Parent Stars of Extrasolar Planets Observed with the SUBARU/HDS
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- Effects of photoperiod and temperature on the induction of adult diapause in Dolycoris baccarum (L.) (Heteroptera: Pentatomidae) from Osaka and Hokkaido, Japan
- Design of Large-Area Surface Wave Plasma Excited by Slotted Waveguide Antennas with Novel Power Divider
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- Observation of Transit-Time Electron Heating by Localize RF Field
- Transit-Time RF Heating of Plasma Based on Fermi Acceleration
- Dispersion and Attenuation of Whistler Waves in a Finite Plasma
- A New Approach to Boronization of Fusion Devices
- Two-Dimensional Modeling of Slot-Excited Surface Waves in Bounded Planar Plasmas
- Radical Control by Wall Heating of a Fluorocarbon Etching Reactor
- Absolute Fluorine Atom Densities in Fluorocarbon High-Density Plasmas Measured by Appearance Mass Spectrometry
- Mechanism of Oxidation of Si Surfaces Exposed to O_2/Ar Microwave-Excited Plasma
- Negative Ion Transfer Model of Low-Temperature Oxidation of Silicon Surface by High-Density Microwave Plasma
- Optical Emission and Microwave Field Intensity Measurements in Surface Wave-Excited Planar Plasma
- Pressure Dependence of Carbon Film Coating by a Toroidal Methane Discharge
- Free Radicals in an Inductively Coupled Etching Plasma
- Excitation of Azimuthally Propagating Ion-Cyclotron Drift Waves in Large Magnetized Plasma : Nuclear Science, Plasmas and Electric Discharges
- Ion Cyclotron Drift Waves in Plasmas with Controlled Radial Density Distributions
- Plasma Oscillation Method for Measurements of Absolute Electron Density in Plasma
- Mechanism of Cross-Field Heating of Ions
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- Power Transmission by Using Laser Beams
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- Modeling Microwave Resonance of Curling Probe for Density Measurements in Reactive Plasmas
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