Electron Density Range Measurable by Microwave Resonator Probe with Higher Mode Resonance
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概要
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A microwave resonator probe is a simple tool for measuring the electron density of 10^{10}--10^{12} cm-3 based on the plasma-induced shift \Delta f in the resonance frequency of a U-shaped wire antenna. However, when the electron density is as low as 10^{8}--10^{10} cm-3, the measurement becomes difficult because of the small \Delta f (low-density limit), and partly because of the reduction in resonance signal amplitude (high-density limit). Here, the measurable electron density range for the given antenna length is elucidated by taking into account these limitations and the instrumental limit of the network analyzer system used in the measurement. To expand the measurable electron density range to measure lower densities, we propose the use of the second-harmonic resonance. In addition to the analysis of the measurable electron density range, the experiments using the harmonic resonance are presented in terms of the electron density dependences on the discharge power and pressure in a surface wave plasma at 2.45 GHz.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2011-11-25
著者
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Sugai Hideo
Department O Electrical Engineering Nagoya University
-
Nakamura Keiji
Department Of Biology And Geosciences Graduate School Of Science Osaka City University:present Addre
-
Liang Yizi
Department of Electronics and Information Engineering, Chubu University, Kasugai, Aichi 487-8501, Japan
-
Kato Kimitaka
Department of Electronics and Information Engineering, Chubu University, Kasugai, Aichi 487-8501, Japan
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