Partial Cross Sections for Electron Impact Dissociation of CF_4 into Neutral Radicals
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概要
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The electron energy dependence of partial cross sections for dissociation of' carbon tetrafluoride (CF_4) into neutral radicals CF_3, CF_2 and CF has been measured. This was accomplished with threshold-ionization mass spectrometry in a differentially pumped dual-electron-beam device. The threshold energy for dissociation into each neutral radical was measured for the first time to be 12.5 eV, 15.0 eV and 20.0 eV for CF_3, CF_2 and CF radicals, respectively. The absolute cross sections for electron impact energy between 10 and 300 eV were determined through measurements of the radical sticking coefficient and electron-impact nitrogen dissociation. The magnitude of the cross section at its maximum is 0.39 × 10^<-20> m^2 at 120 eV for CF_3 radical, 0.22 × 10^<-20> m^2 at 130 eV for CF_2 radical, and 0.21 × 10^<-20> m^2 at 110 eV for CF radical.
- 社団法人応用物理学会の論文
- 1992-09-15
著者
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Nakano Tohru
Department Of Electrical Engineering Nagoya University
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Sugai Hideo
Department O Electrical Engineering Nagoya University
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