INFLUENCE OF ION-INDUCED RADICAL DESORPTION FROM FLUOROCARBON DEPOSITS IN A HIGH DENSITY PLASMAS
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概要
- 論文の詳細を見る
- 1997-12-15
著者
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Nakamura Keiji
Department Of Electrical Electronics And Information Engineering Graduate School Of Engineering Osak
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Sugai Hideo
Department O Electrical Engineering Nagoya University
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HIRAKATA Naoto
Department of Electrical Engineering, Nagoya University
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Hirakata Naoto
Department Of Electrical Engineering Nagoya University
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Nakamura K
Chubu Univ.
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Nakamura Keiji
Department Of Biology And Geosciences Graduate School Of Science Osaka City University:present Addre
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