Plasma Oscillation Method for Measurements of Absolute Electron Density in Plasma
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概要
- 論文の詳細を見る
A new and simple method for precise measurements of electron density in a plasma with use of plasma oscillations is described. A weak electron beam is injected from a hot filament and excites electron waves oscillating at the plasma frequency ω_p, whose sharp spectrum, obtained using a detector, gives the electron density. This plasma oscillation method is free of many difficulties often encountered with a Langmuir probe, such as thin film deposition, plasma potential fluctuation, and magnetic fields. The measurement technique is theoretically analyzed and experimentally demonstrated in the density measurements of an inductively coupled rf plasma, together with a comparison with the Langmuir probe method.
- 社団法人応用物理学会の論文
- 1993-11-15
著者
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Sugai Hideo
Department Of Electrical Engineering Faculty Of Engineering Nagoya University
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Shirakawa Teruyuki
Department Of Electrical Engineering Nagoya University
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Shirakawa T
School Of Social Information Studies Otsuma Women's University
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Sugai Hideo
Department O Electrical Engineering Nagoya University
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