Hydrogen Release and Retention Dynamics of Amorphous Carbon Layers Exposed to a Hydrogen/Helium Plasma
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概要
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H2 and DH release was measured in a pulsed deuterium discharge over a carbon-thin-film deposited wall. The 300 eV D$_{2}^{+}$ irradiation induced a large quantity of hydrogen release from carbon layers deposited by a H$_{2}+$CH4 discharge. On the other hand, a strong pumping effect was observed for carbon layers deposited by a He$+$CH4 discharge. The pumping effect was attributed to interstitial vacancies in the films. Experimental evidence suggesting molecular formation by direct hydrogen abstraction was found. A dynamic model of hydrogen recycling on carbon layers is proposed. Corresponding calculations yield satisfactory agreement with observations. The pumping effect was always observed after conditioning of the wall with a helium glow discharge. The helium ion bombardment creates many interstitial vacancies after the hydrogen release.
- INSTITUTE OF PURE AND APPLIED PHYSICSの論文
- 1989-06-20
著者
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Toyoda Hirotaka
Department Of Electrical Engineering And Computer Science Nagoya University
-
Sugai Hideo
Department O Electrical Engineering Nagoya University
-
Yoshida Shinji
Department of Electrical Engineering, Nagoya University, Nagoya 464-01
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Toyoda Hirotaka
Department of Electrical Engineering, Nagoya University, Nagoya 464-01
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