Pressure Dependence of Carbon Film Coating by a Toroidal Methane Discharge
スポンサーリンク
概要
- 論文の詳細を見る
A pure methane discharge under a toroidal magnetic field has been used to deposit thin carbon layers in situ onto the walls of a toroidal vessel, with a view to application to magnetic fusion devices. Hard carbon films with high electrical resistivity were formed on stainless steel, silicon, and Nail substrates, in a wide range of methane pressure (10^<-4>〜10^<-2> Torr). The film properties and structures were examined by infrared absorption, X-ray photoemission analysis, electron microscopy (TEM, TED, SUM), and so forth. The results show that the films predominantly consist of tetrahedrally bonded carbon (sp^3 bonding). Both the hydrogen atom concentration in the films and the binding energy of the carbon atoms increase with increasing methane pressure. Also, the size of microcrystallites on a background consisting of anamorphous structure grows with increasing pressure.
- 社団法人応用物理学会の論文
- 1985-11-20
著者
-
Sugai Hideo
Department of Electrical Engineering, Nagoya University
-
Sugai Hideo
Department Of Electrical Engineering Nagoya University
-
Sugai Hideo
Department Of Electrical Engineering Faculty Of Engineering Nagoya University
-
OKUDA Takayoshi
Department of Electronics, Nagoya University
-
Kojima Hiroaki
Department Of Electrical Engineering Nagoya University
-
TERADA Mamoru
Department of Parasitology, Hamamatsu University School of Medicine
-
Terada Mamoru
Department Of Electrical Engineering Nagoya University
-
KAKO Hidenori
Department of Electrical Engineering, Nagoya University
-
Okuda Takayoshi
Department Of Electrical Engineering Faculty Of Engineering Nagoya University
-
Okuda Takayoshi
Department Of Electrical Engineering Nagoya University
-
Sugai Hideo
Department O Electrical Engineering Nagoya University
-
Kako Hidenori
Department Of Electrical Engineering Nagoya University
関連論文
- Plasma Absorption Probe for Measuring Electron Density in an Environment Soiled with Processing Plasmas
- Diagnostic of Surface Wave Plasma for Oxide Etching in Comparison with Inductive RF Plasma
- Dependences of Giant Magnetoresistance in Co/Cu Multilayers on Sputtering Conditions
- Electron-Impact Dissociation of Methane into CH_3 and CH_2 Radicals : II. Absolute Cross Sections
- Electron-Impact Dissociation of Methane into CH_3 and CH_2 Radicals : I. Relative Cross Sections
- Dissociative Ion Yields on Metal Surfaces Bombarded with Low-Energy Fluorocarbon Ions
- Observation of Ion Scattering from Metal Surfaces Bombarded with Low-Energy Hydrocarbon Ions
- Generation of a Large Electron Beam for Plasma Processing
- Formation of CH Radical by Surface Bombardment in a Methane/Argon DC Discharge
- RF Plasma Production at Ultralow Pressures with Surface Magnetic Confinement
- Two-Photon Ionization of Cesium and Sodium Vapors
- Space- and Time-Resolved Measurements of Negative Ions in a Pulsed Inductively-Coupled Plasma in Chlorine
- A New Technology for Negative Ion Detection and the Rapid Electron Cooling in a Pulsed High-Density Etching Plasma
- Hydrogen-Reduced Carbonization by Acetylene Discharges
- In vivo antimalarial activity of aqueous extracts from Kenyan medicinal plants and their interactions with chloroquine
- Radial Distributions of Z-Current and Electron Density in a Screw-Pinch Discharge
- Wall Heating Effect on Crystallization of Low-Temperature Deposited Silicon Films from an Inductuvely-Coupled Plasma
- Lower Temperature Deposition of Polycrystalline Silicon Films from a Modified Inductively Coupled Silane Plasma
- LOW-TEMPERATURE FORMATION OF poly-Si FILMS BY INDUCTIVELY-COUPLED SILANE PLASMA
- Asymmetric Sidebands of Low Frequency Waves in a Current Carrying Plasma
- Excitation and Damping of Continuous Pseudo Acoustic and Ion Waves in a Plasma
- Ballistic Phase Mixing of Continuous Pseudo Waves in a Plasma
- Ion Wave Damping in a Nonuniform Plasma
- Ion Wave Damping in Nonuniform Plasma
- Drastic Change in CF_2 and CF_3 Kinetics Induced by Hydrogen Addition into CF_4 Etching Plasma
- Spatial Distribution and Surface Loss of CF_3 and CF_2 Radicals in a CF_4 Etching Plasma
- Radial Density Profile of Microwave Plasma for Wall Conditioning in a Purely Toroidal Magnetic Field (小特集 粒子・熱制御とプラズマ対向材料研究の進展--IEA/TEXTOR共同研究の成果と現状)
- High Speed Cleaning of Boronized Wall with a CF_4 Containing Plasma
- Rapid Cleaning of Boronized Walls with a Chlorine/Hydrogen Glow Discharge
- Influence of Excitation Frequency on the Electron Distribution Function in Capacitively Coupled Discharges in Argon and Helium
- A Radio Frequency Driven DC Electron Beam Source
- Dramatic Improvement of Surface Wave Plasma Performance Using a Corrugated Dielectric Plate : Nuclear Science, Plasmas, and Electric Discharges
- Dependence of Fluorocarbon Plasma Chemistry on the Electron Energy Distribution Function
- Mode Conversion and Electron Heating by Oblique Injection of the Ordinary Mode into Over-Dense Plasma
- Electron Heating by Oblique Injection of Ordinary Mode into Overdense Plasma
- Suppression of Oxygen Impurity Incorporation into Silicon Films Prepared from Surface-Wave Excited H_2/SiH_4 Plasma
- Lower-Temperature Growth of Hydrogenated Amorphous Silicon Films from Inductively Coupled Silane Plasma
- Simple Direct Monitoring of SiH_3 Radical and Particulates in a Silane Plasma with Ultraviolet Transmission Spectroscopy
- Cross Section Measurements for Electron-Impact Dissociation of CHF_3 into Neutral and Ionic Radicals
- Cross Sections for Electron-Impact Dissociation of Alternative Etching Gas, C_3HF_7O
- Test-Wave Measurements of Microwave Absorption Efficiency in a Planar Surface-Wave Plasma Reactor
- Production of Low-Pressure Planar Non-Magnetized Plasmas Sustained under a Dielectric-Free Metal-Plasma Interface
- Production and Control of Low-Pressure Ar and CF_4 Plasmas Using Surface Waves
- Seasonal variation in the content of a febrifugine and isofebrifugine alkaloid mixture in aerial parts of Hydrangea macrophylla var. Otaksa, with special reference to its antimalarial activity
- A Potent antimalarial activity of Hydrangea macrophylla var. Otaksa leaf extract against Plasmodium yoelii 17XL in mice
- Interaction of Laser Blow-Off Blob with a Low-Pressure Gas Discharge
- Cross Section Measurements for Electron-Impact Dissociation of C_4F_8 into Neutral and Ionic Radicals
- Effect of Magnetic Shaping on the Helical Instability
- Equivalent Circuit Model and Magnetic Field Diffusion Equation in the Tokamak Simulation
- Positional Behaviour of the Plasma Column in a Shell-Less Octopole Tokamak
- Equilibrium in a Multipole Tokamak
- High-Speed Etching of Indium-Tin-Oxide Thin Films Using an Inductively Coupled Plasma ( Plasma Processing)
- Effects of albendazole against larval and adultAngiostrongylus cantonensis in rats
- Whistler Wave Trapping in a Narrow Density Trough
- Observation of Transit-Time Electron Heating by Localize RF Field
- Transit-Time RF Heating of Plasma Based on Fermi Acceleration
- Dispersion and Attenuation of Whistler Waves in a Finite Plasma
- IN VIVO EVALUATION OF COMBINATION EFFECTS OF CHLOROQUINE WITH CEPHARANTHIN^【○!R】OR MINOCYCLINE HYDROCHLORIDE AGAINST BLOOD-INDUCED CHLOROQUINE-RESISTANT PLASMODIUM BERGHEI NK 65 INFECTIONS
- A New Approach to Boronization of Fusion Devices
- Two-Dimensional Modeling of Slot-Excited Surface Waves in Bounded Planar Plasmas
- Radical Control by Wall Heating of a Fluorocarbon Etching Reactor
- Velocity Space Diffusion of High Energy Ions Induced by a Lower Hybrid Wave in a Nonuniform Magnetic Field
- Effects of Lower Hybrid Wave Heating on Alpha-Particle Confinement in a Tokamak
- Effect of Lower Hybrid Wave Heating on Alpha-Particle Dynamics
- Absolute Fluorine Atom Densities in Fluorocarbon High-Density Plasmas Measured by Appearance Mass Spectrometry
- Mechanism of Oxidation of Si Surfaces Exposed to O_2/Ar Microwave-Excited Plasma
- Negative Ion Transfer Model of Low-Temperature Oxidation of Silicon Surface by High-Density Microwave Plasma
- Optical Emission and Microwave Field Intensity Measurements in Surface Wave-Excited Planar Plasma
- Pressure Dependence of Carbon Film Coating by a Toroidal Methane Discharge
- STUDIES ON CHEMOTHERAPY OF PARASITIC HELMINTHS (VIII). EFFECTS OF SOME POSSIBLE NEUROTRANSMITTERS ON THE MOTILITY OF ANGIOSTRONGYLUS CANTONENSIS
- STUDIES ON CHEMOTHERAPY OF PARASITIC HELMINTHS (VII). EFFECTS OF VARIOUS CHOLINERGIC AGENTS ON THE MOTILITY OF ANGIOSTRONGYLUS CANTONENSIS
- STUDIES ON CHEMOTHERAPY OF PARASITIC HELMINTHS (VI) EFFECTS OF VARIOUS NEUROPHARMACOLOGICAL AGENTS ON THE MOTILITY OF DIPYLIDIUM CANINUM
- Genetic analysis of mortality in murine angiostrongyliasis costaricensis using SMXA recombinant inbred mouse strains
- Effects of Amorphous and Polymorphs of PF1022A, a New Antinematode Drug, on Angiostrongylus costaricensis in Mice
- Relativistic Corrections to the Spectrum of Scattered Light from a High Temperature Plasma
- Toxicologic Investigation of Dimethylacrylamide in Mice
- FUNDAMENTAL STUDIES ON PHYSIOLOGICAL AND PHARMACOLOGICAL ACTIONS OF L-ASCORBATE 2-SULFATE. VI. EFFECTS OF L-ASCORBATE 2-SULFATE ON LIPID METABOLISM IN GUINEA PIGS
- FUNDAMENTAL STUDIES ON PHYSIOLOGICAL AND PHARMACOLOGICAL ACTIONS OF L-ASCORBATE 2-SULFATE. V. ON THE HYPOLIPIDEMIC AND ANTIATHEROSCLEROTIC EFFECTS OF L-ASCORBATE 2-SULFATE IN RABBITS
- Equilibrium and Current Distribution of Toroidal Plasma in Axially Symmetric System
- Plasma-Induced Arc and Its Plasma Response in a Toroidal Device
- Free Radicals in an Inductively Coupled Etching Plasma
- Excitation of Azimuthally Propagating Ion-Cyclotron Drift Waves in Large Magnetized Plasma : Nuclear Science, Plasmas and Electric Discharges
- Ion Cyclotron Drift Waves in Plasmas with Controlled Radial Density Distributions
- Plasma Oscillation Method for Measurements of Absolute Electron Density in Plasma
- Mechanism of Cross-Field Heating of Ions
- Wall Temperature Dependence of Boronization Using Decaborane and Diborane
- Horizontal Plasma Position Control System for a Tokamak Using Modern Optimal Control Theory
- Compact Antennas for Lower Hybrid Wave Heating
- Monitoring of Radiation and Impurity Transport in HYBTOK-I Plasma
- Alumina Loaded Antenna for Lower Hybrid Wave Heating
- Effict of Lower Hybrid Heating on Fast Ion Behavior in a Tokamak
- Effects of Diaphragm on the Current Distribution and Stability in the Screw-Pinch Discharge
- Impedance of a Partially Ionized Cecium Plasma
- Collapse of a Plasma Column and Its Suppression in a Linear Screw-Pinch
- Theory of Two-Photon Excitation and Three-Photon Ionization of Atom by Laser Light
- Relativistic Correction to the Electron Density Measured by Lase Light Scattering
- Production and Physical Properties of Cesium Plasma by Resonance Absorption
- Surface Wave Eigenmodes in a Finite-Area Plane Microwave Plasma
- Spasmogenic effects of L-ascorbic acid on the guinea pig isolated ileum preparation.
- Response of a partially ionized drifting plasma to temperature perturbation