High Speed Cleaning of Boronized Wall with a CF_4 Containing Plasma

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1991-03-15

著者

• Sugai Hideo

  Department of Electrical Engineering, Nagoya University

• Toyoda Haruhisa

  Department Of Material Physics Faculty Of Engineering Science Osaka University

• Toyoda H

  Department Of Electrical Engineering School Of Engineering Nagoya Univeristy

• Toyoda H

  Nagoya Univ. Nagoya Jpn

• Toyoda Hirotaka

  Department Of Electrical Engineering Nagoya University

• Sugai Hideo

  Department Of Electrical Engineering Faculty Of Engineering Nagoya University

• YAMAGE Masashi

  Nagoya University

• Hanami Atsuo

  Department of Electrical Engineering, Faculty of Engineering Nagoya University

• Yamage Masashi

  Department of Electrical Engineering, Faculty of Engineering Nagoya University

• Toyoda Hirotaka

  Department Of Electrical Engineering And Computer Science Nagoya University

• Hanami Atsuo

  Department Of Electrical Engineering Faculty Of Engineering Nagoya University

• Yamage Masashi

  Department Of Electrical Engineering Faculty Of Engineering Nagoya University

• Sugai Hideo

  Department O Electrical Engineering Nagoya University

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