Two-Dimensional Modeling of Slot-Excited Surface Waves in Bounded Planar Plasmas
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概要
- 論文の詳細を見る
The excitation of electromagnetic waves launched by a linear slot antenna in a planar bounded surface wave plasma is modeled and numerically analyzed. For simplicity, a two-dimensional(infinite along x)model is applied. The electromagnetic field distribution, the total field energy and the power reflection coefficient R are computed. All are found to depend critically on the electron density n_e, and the density dependencies qualitatively reproduce the known experimental behavior. In particular, the computed R-n_e dependencies with sharp minima at some resonance densities result in the experimentally observed[Ghanashev et al.:Jpn.J.Appl.Phys.36(1997)4704]mode jumps and hysteresis loops in the power-density curves. The computational efficiency achieved through the two-dimensional formulation makes the model suitable for use as a part of a self-consistent analysis of the surface-wave plasma source operation.
- 社団法人応用物理学会の論文
- 2000-07-15
著者
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Ghanashev Ivan
Department of Electrical Engineering, Nagoya University
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Sugai Hideo
Department of Electrical Engineering, Nagoya University
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Ghanashev Ivan
Department Of Electrical Engineering Nagoya University
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ABDEL-FATTAH Essam
Department of Electrical Engineering, Graduate School of Engineering, Nagoya University
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Abdel‐fattah E
Nagoya Univ. Nagoya Jpn
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Abdel-fattah Essam
Department Of Electrical Engineering Nagoya University
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Sugai Hideo
Department O Electrical Engineering Nagoya University
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Abdel-Gattah Essam
Department of Electrical Engineering, Nagoya University
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