Suppression of High-Energy Backscattered Particles in Magnetron Plasma Using Cylindrical Cathode
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概要
- 論文の詳細を見る
In a conventional argon magnetron source using a planar cathode (target), numerous backscattered high-energy (100–200 eV) argon atoms and ions impinge on a substrate, often causing damage in sputtered films. In order to reduce such energetic particles, a cylindrical magnetron source is proposed where most of the high-energy particles are confined inside a cylindrical cathode with low-energy particles impinge on the substrate outside the cylinder. Ar+ ion energy distributions of planar and cylindrical magnetron sources are measured using a mass spectrometer with an energy analyzer. In the cylindrical magnetron, a marked decrease in the energetic component is observed compared with that in the planar magnetron. A Monte Carlo code is developed to simulate energy distributions of Ar and Ar+ in the cylindrical magnetron source. Simulated Ar+ energy distributions are in good agreement with the measurements, reproducing the experimental results.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2007-12-15
著者
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Takagi Yusuke
Department Of Cardiovascular Medicine Tohoku University Graduate School Of Medicine
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Toyoda Hirotaka
Department Of Electrical Engineering And Computer Science Nagoya University
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Sugai Hideo
Department O Electrical Engineering Nagoya University
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Takagi Yusuke
Department of Electrical Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan
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Toyoda Hirotaka
Department of Electrical Engineering, Nagoya University, Furo-cho, Chikusa-ku, Nagoya 464-8603, Japan
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Sugai Hideo
Department of Electronics and Information Engineering, Chubu University, 1200 Matsumoto-cho, Kasugai, Aichi 487-8501, Japan
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