Hydrogen-Reduced Carbonization by Acetylene Discharges

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1986-09-20

著者

• Sugai Hideo

  Department of Electrical Engineering, Nagoya University

• NODA Nobuaki

  Plasma Physics Laboratory, Kyoto University

• Sugai Hideo

  Department Of Electrical Engineering Faculty Of Engineering Nagoya University

• Noda N

  Kyoto Univ. Uji Jpn

• Noda Nobuaki

  Plasma Physics Laboratory Kyoto University

• OKUDA Takayoshi

  Department of Electronics, Nagoya University

• URANO Shuichi

  Department of Electrical Engineering, Nagoya University

• AMEMIYA Susumu

  Department of Nuclear Engineering, Nagoya University

• ISHIKAWA Kazuyuki

  Department of Nuclear Engineering, Nagoya University

• Urano Shuichi

  Department Of Electrical Engineering Nagoya University

• Amemiya Susumu

  Department Of Nuclear Engineering Nagoya University

• Noda N

  Plasma Physics Laboratory Kyoto University

• Noda N

  National Institute For Fusion Science

• Okuda Takayoshi

  Department Of Electrical Engineering Faculty Of Engineering Nagoya University

• Ishikawa Kazuyuki

  Department Of Nuclear Engineering Nagoya University

• Sugai Hideo

  Department O Electrical Engineering Nagoya University

関連論文

• Achievement of 10 keV Central Electron Temperatures by ECH in LHD
• Comparative Study on Effect of Boronization and Titanium Gettering in Compact Helical System Heliotron/Torsatron Device
• Plasma Absorption Probe for Measuring Electron Density in an Environment Soiled with Processing Plasmas
• Diagnostic of Surface Wave Plasma for Oxide Etching in Comparison with Inductive RF Plasma
• Retention and Desorption of Hydrogen and Helium in Inner Wall Material Used for The Large Helical Device (LHD) : Simulation experiments using a glow discharge apparatus
• Spectrum Identification of Heliotron E Plasma Impurities by a Time-Resolving Grazing Incidence Spectrometer with a Multichannel Detector : Nuclear Science, Plasmas and Electric Discharges
• The Sources of Fe Impurity in Heliotron E Plasma during NBI : Nuclear Science, Plasmas and Electric Discharges
• Characteristics of Cleaning and Carbonizing Plasmas in TEXTOR
• Dependences of Giant Magnetoresistance in Co/Cu Multilayers on Sputtering Conditions
• Soft X-Ray Tomography of the m=2 Magnetic Island Structure in the JIPP T-II Tokamak
• Spectroscopic Studies on Carbon Coating in Heliotron E : Nuclear Science, Plasmas and Electric Discharges
• Electron-Impact Dissociation of Methane into CH_3 and CH_2 Radicals : II. Absolute Cross Sections
• Electron-Impact Dissociation of Methane into CH_3 and CH_2 Radicals : I. Relative Cross Sections
• Dissociative Ion Yields on Metal Surfaces Bombarded with Low-Energy Fluorocarbon Ions
• Observation of Ion Scattering from Metal Surfaces Bombarded with Low-Energy Hydrocarbon Ions
• Impurity Deposition and Retention of Discharge Gas on Plasma Facing Wall in LHD
• Generation of a Large Electron Beam for Plasma Processing
• Formation of CH Radical by Surface Bombardment in a Methane/Argon DC Discharge
• RF Plasma Production at Ultralow Pressures with Surface Magnetic Confinement
• Two-Photon Ionization of Cesium and Sodium Vapors
• Helium Retention of 316L Stainless Steel Used for The First Wall of The Large Helical Device (LHD)
• Space- and Time-Resolved Measurements of Negative Ions in a Pulsed Inductively-Coupled Plasma in Chlorine
• A New Technology for Negative Ion Detection and the Rapid Electron Cooling in a Pulsed High-Density Etching Plasma
• Hydrogen-Reduced Carbonization by Acetylene Discharges
• Thermal Characteristics of a Metal-Film Bolometer
• Radiation Loss and Impurity Abundance during ICRF Heating in the JIPP T-IIU Tokamak
• Characteristics of the Detectors for Bolometric Measurement in Application to High Temperature Plasma
• Effect of In Situ Carbon Coating on ICRF-Heated Tokamak Plasmas Relating to Radiation Loss by Iron-Impurities in JIPP T-IIU
• Measurement of Electron Cyclotron Emission from JIPP T-II Plasma
• Fourier Transform Spectroscopy of Electron Cyclotron Emission from JIPP T-II Torus
• Radial Distributions of Z-Current and Electron Density in a Screw-Pinch Discharge
• Wall Heating Effect on Crystallization of Low-Temperature Deposited Silicon Films from an Inductuvely-Coupled Plasma
• Lower Temperature Deposition of Polycrystalline Silicon Films from a Modified Inductively Coupled Silane Plasma
• LOW-TEMPERATURE FORMATION OF poly-Si FILMS BY INDUCTIVELY-COUPLED SILANE PLASMA
• Asymmetric Sidebands of Low Frequency Waves in a Current Carrying Plasma
• Excitation and Damping of Continuous Pseudo Acoustic and Ion Waves in a Plasma
• Ballistic Phase Mixing of Continuous Pseudo Waves in a Plasma
• Ion Wave Damping in a Nonuniform Plasma
• Ion Wave Damping in Nonuniform Plasma
• Drastic Change in CF_2 and CF_3 Kinetics Induced by Hydrogen Addition into CF_4 Etching Plasma
• Spatial Distribution and Surface Loss of CF_3 and CF_2 Radicals in a CF_4 Etching Plasma
• Radial Density Profile of Microwave Plasma for Wall Conditioning in a Purely Toroidal Magnetic Field (小特集 粒子・熱制御とプラズマ対向材料研究の進展--IEA/TEXTOR共同研究の成果と現状)
• High Speed Cleaning of Boronized Wall with a CF_4 Containing Plasma
• Rapid Cleaning of Boronized Walls with a Chlorine/Hydrogen Glow Discharge
• Influence of Excitation Frequency on the Electron Distribution Function in Capacitively Coupled Discharges in Argon and Helium
• A Radio Frequency Driven DC Electron Beam Source
• Dramatic Improvement of Surface Wave Plasma Performance Using a Corrugated Dielectric Plate : Nuclear Science, Plasmas, and Electric Discharges
• Dependence of Fluorocarbon Plasma Chemistry on the Electron Energy Distribution Function
• Mode Conversion and Electron Heating by Oblique Injection of the Ordinary Mode into Over-Dense Plasma
• Electron Heating by Oblique Injection of Ordinary Mode into Overdense Plasma
• Suppression of Oxygen Impurity Incorporation into Silicon Films Prepared from Surface-Wave Excited H_2/SiH_4 Plasma
• Lower-Temperature Growth of Hydrogenated Amorphous Silicon Films from Inductively Coupled Silane Plasma
• Simple Direct Monitoring of SiH_3 Radical and Particulates in a Silane Plasma with Ultraviolet Transmission Spectroscopy
• Cross Section Measurements for Electron-Impact Dissociation of CHF_3 into Neutral and Ionic Radicals
• Cross Sections for Electron-Impact Dissociation of Alternative Etching Gas, C_3HF_7O
• Test-Wave Measurements of Microwave Absorption Efficiency in a Planar Surface-Wave Plasma Reactor
• Production of Low-Pressure Planar Non-Magnetized Plasmas Sustained under a Dielectric-Free Metal-Plasma Interface
• Production and Control of Low-Pressure Ar and CF_4 Plasmas Using Surface Waves
• Interaction of Laser Blow-Off Blob with a Low-Pressure Gas Discharge
• Cross Section Measurements for Electron-Impact Dissociation of C_4F_8 into Neutral and Ionic Radicals
• Effect of Magnetic Shaping on the Helical Instability
• Equivalent Circuit Model and Magnetic Field Diffusion Equation in the Tokamak Simulation
• Positional Behaviour of the Plasma Column in a Shell-Less Octopole Tokamak
• Equilibrium in a Multipole Tokamak
• High-Speed Etching of Indium-Tin-Oxide Thin Films Using an Inductively Coupled Plasma ( Plasma Processing)
• Decay of ^Ho Isomers to Levels in ^Er
• Whistler Wave Trapping in a Narrow Density Trough
• Observation of Transit-Time Electron Heating by Localize RF Field
• Transit-Time RF Heating of Plasma Based on Fermi Acceleration
• Dispersion and Attenuation of Whistler Waves in a Finite Plasma
• A New Approach to Boronization of Fusion Devices
• Two-Dimensional Modeling of Slot-Excited Surface Waves in Bounded Planar Plasmas
• Radical Control by Wall Heating of a Fluorocarbon Etching Reactor
• Velocity Space Diffusion of High Energy Ions Induced by a Lower Hybrid Wave in a Nonuniform Magnetic Field
• Effects of Lower Hybrid Wave Heating on Alpha-Particle Confinement in a Tokamak
• Effect of Lower Hybrid Wave Heating on Alpha-Particle Dynamics
• Absolute Fluorine Atom Densities in Fluorocarbon High-Density Plasmas Measured by Appearance Mass Spectrometry
• Mechanism of Oxidation of Si Surfaces Exposed to O_2/Ar Microwave-Excited Plasma
• Negative Ion Transfer Model of Low-Temperature Oxidation of Silicon Surface by High-Density Microwave Plasma
• Optical Emission and Microwave Field Intensity Measurements in Surface Wave-Excited Planar Plasma
• Pressure Dependence of Carbon Film Coating by a Toroidal Methane Discharge
• Relativistic Corrections to the Spectrum of Scattered Light from a High Temperature Plasma
• Gamma-Ray Spectroscopy of ^As
• Gamma-Ray Spectroscopy of ^K
• Equilibrium and Current Distribution of Toroidal Plasma in Axially Symmetric System
• Plasma-Induced Arc and Its Plasma Response in a Toroidal Device
• Free Radicals in an Inductively Coupled Etching Plasma
• Excitation of Azimuthally Propagating Ion-Cyclotron Drift Waves in Large Magnetized Plasma : Nuclear Science, Plasmas and Electric Discharges
• Ion Cyclotron Drift Waves in Plasmas with Controlled Radial Density Distributions
• Plasma Oscillation Method for Measurements of Absolute Electron Density in Plasma
• Mechanism of Cross-Field Heating of Ions
• Wall Temperature Dependence of Boronization Using Decaborane and Diborane
• Surface Wave Eigenmodes in a Finite-Area Plane Microwave Plasma
• Statistical Analysis of the Convective Intermittent Transport at the Edge Region of QUEST
• Response of a partially ionized drifting plasma to temperature perturbation
• Cross section measurements of (n,n') and (n,2n) reactions on zirconium and lead targets at 14.8 MeV.
• Neutron activation cross section of molybdenum isotopes at 14.8MeV.
• Formation cross sections of zirconium-90m and lead-207m with fast neutrons.
• Fast Neutron Automatic Activation System
• Impurity measurements in plasma boundary of JIPP T-II tokamak/stellarator.

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