Wall Temperature Dependence of Boronization Using Decaborane and Diborane
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概要
- 論文の詳細を見る
A new boronization technique based on pyrolysis of boron hydrides on hot walls was investigated in a laboratory experiment. The deposition rate of boron films through pyrolysis of decaborane was high enough to apply the pyrolysis to actual fusion devices bakable to 300℃. The hydrogen concentration of boron films prepared by the pyrolysis or conventional plasma-assisted boronization at various temperatures was measured with ^<15>N nuclear reaction and/or IR absorption methods. The hydrogen content markedly decreased with increasing wall temperature, where decaborane always gives higher H content than diborane. Oxygen gettering and hydrogen recycling in a boronized vessel were evaluated by pulsed glow discharge in O_2/He and D_2, respectively. The results were compared between the pyrolysis and the plasma-based boronizations in decaborane or diborane at various wall temperatures.
- 社団法人応用物理学会の論文
- 1993-09-15
著者
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Sugai Hideo
Department Of Electrical Engineering Faculty Of Engineering Nagoya University
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OGIWARA Norio
Japan Atomic Energy Research Institute, Naka Fusion Research Establishment
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YAMAGE Masashi
Nagoya University
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Ogiwara N
Japan Atomic Energy Research Institute Naka Fusion Research Establishment
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Yamage Masashi
Department Of Electrical Engineering Faculty Of Engineering Nagoya University
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SAIDOH Masahiro
Naka Fusion Research Establishment, Japan Atomic Energy Research Institute
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Saidoh M
Naka Fusion Research Establishment Japan Atomic Energy Research Institute
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EJIMA Takeshi
Department of Electrical Engineering, Nagoya University
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OGIWARA Norio
Naka Fusion Research Establishment, Japan Atomic Energy Research Institute
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Sugai Hideo
Department O Electrical Engineering Nagoya University
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Ejima Takeshi
Department Of Electrical Engineering Nagoya University
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