Sputtering Behavior of Boron Using Electron Cyclotron Resonance Plasma

スポンサーリンク

概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1994-10-15

著者

• NISHIKAWA Masahiro

  Department of Internal Medicine, Ikeda Municipal Hospital

• ITO Yoshifumi

  Department of Material Science, Interdisciplinary Faculty of Science and Engineering, Shimane Univer

• Ito Yoshifumi

  Department Of Electromagnetic Energy Engineering Faculty Of Engineering Osaka University

• KURIKI Shunichi

  Department of Electromagnetic Energy Engineering, Faculty of Engineering, Osaka University

• SAIDOH Masahiro

  Naka Fusion Research Establishment, Japan Atomic Energy Research Institute

• Kuriki Shunichi

  Department Of Electromagnetic Energy Engineering Faculty Of Engineering Osaka University

• Saidoh M

  Naka Fusion Research Establishment Japan Atomic Energy Research Institute

• Nishikawa M

  Kent State Univ. Ohio Usa

• Nishikawa Masahiro

  Department Of Biology Graduate School Of Natural Science Konan University

• ITO YOSHIFUMI

  Department of Chemical Engineering, Kyoto University

• Ito Yoshifumi

  Department of Applied Chemistry, Faculty of Engineering, Doshisha University

関連論文

• Changes in serum hepatic fibrosis markers in biochemical responders to interferon therapy for chronic hepatitis C
• Combined hepatocellular/cholangiocellular carcinoma with sarcomatoid features : genetic analysis for histogenesis
• Accumulation of β-catenin in the cytoplasm and the nuclei during the early hepatic tumorigenesis
• Initial Boronization of JT-60U Tokamak Using Decaborane
• Synthesis and Magnetic Properties of a Planar Binuclear Copper(II) Phthalocyanine Complex
• A Study of High Pretilt Angle Generation in Nematic Liquid Crystal (5CB) on Rubbed Polythiophene Surfaces with Alkyl Chain Lengths
• Effect of the Molecular Structure of Weakly Rubbed Organic Solvent Soluble Polyimides with Trifluoromethyl Moieties on Anchoring Strength of Liquid Crystals
• Anisotropic Dispersion Force Effects for Alignment of Liquid Crystals on Rubbed Polystyrene Surfaces
• Effect of the Polymer Tilt Angle for Generation of Pretilt Angle in Nematic Liquid Crystal on Rubbed Polyimide Surfaces
• Effects of Conjugation of Mesogenic Core of Nematic Liquid Crystals for Polar Anchoring Energy and Surface Order Parameter on Rubbed Polyimide Films
• Pretilt Angles of Liquid Crystal on Organic-Solvent-Soluble Polyimide Alignment Films
• Synthesis of a Novel Organic-Solvent-Soluble Polyimide and Its Application to Alignment Film for Liquid Crystal Displays
• Thermal Stability of Magnetically-Aligned Nematic Liquid Crystal Layer on Nonrubbed Polyimide Surface
• New Photo-Aligned Multi-Domain Liquid Crystal Display Formed Utilizing a Liquid Crystal Polarizer
• Soluble Copolymides Based on 2, 3, 5-Tricarboxycyclopentyl Acetic Dianhydride and Conventional Aromatic Tetracarboxylic Dianhydrides
• Soluble Polyimides Based on 2,3,5-Tricarboxycyclopentyl Acetic Dianhydride
• Properties of Voltage Holding Ratios of Liquid Crystal Cells Using Organic-Solvent-Soluble Polyimide Alignment Films
• Theory of (Vector Valued) Fourier Hyperfunctions. Their Realization as Boundary Values of (Vector Valued) Slowly Increasing Holomorphic Functions (IV)
• Sputtering Behavior of Boron Using Electron Cyclotron Resonance Plasma
• Electron Cyclotron Resonance Discharge of Sublimation Gas of Decaborane and Its Application to Preparation of Boron Thin Films ( Plasma Processing)
• Electron Cyclotron Resonance Discharge of Gas Sublimated from Decaborane by CO_2 Laser Irradiation
• Theory of (Vector Valued) Fourier Hyperfunctions. : Their Realization as Boundary Values of (Vector Valued) Slowly Increasing Holomorphic Function, (V)
• Boundary Values of (Slowly Increasing) Holomorphic Functions
• Theory of (Vector Valued) Fourier Hyperfunctions. Their Realization as Boundary Values of (Vector Valued) Slowly Increasing Holomorphic Functions, (III)
• Errata of "Theory of (Vector Valued) Fourier Hyperfunctions. Their Realization as Boundary Values of (Vector Valued) Slowly Increasing Holomorphic Functions, (III), J. Math. Tokushima Univ., 23(1989), 23-38"
• Stationary Fourier Hyperfields
• On the Borel Graph Theorem and the Open Mapping Theorem
• Enantioselective Nucleophilic Substitution of a 6,6-Bicyclic Dienyl Acetate by Palladium-Chiral Phosphine Catalyst
• Carbachol and Cholecystokinin Enhance Accumulation of Nicotine in Rat Pancreatic Acinar Cells
• Ion Bombardment Effects on Boron Nitride Film Synthesis by Reactive Sputtering with Electron Cyclotron Resonance Plasmas
• Cubic Boron Nitride Film Synthesis by Reactive Sputtering of Pure Boron Target in Electron Cyclotron Resonance Plasmas
• Flowing Mercury Afterglow Excited by D. C. Discharge
• Depopulation of Excited Mercury Atoms by Collisions with Hydrogen Molecules in the Flowing Mercury Afterglow
• Intensity Relaxation of Certain Hg Lines in Preionized Mercury Vapor Flow
• Degradation of Sphingoid Long-Chain Base 1-Phosphates (LCB-1Ps) : Functional Characterization and Expression of AtDPL1 Encoding LCB-1P Lyase Involved in the Dehydration Stress Response in Arabidopsis
• Effects of Diet on Cholecystokinin-Stimulated Amylase Secretion by Pancreatic Acini and Amylase mRNA Levels in Rat Pancreas
• Wall Temperature Dependence of Boronization Using Decaborane and Diborane
• Decrease in Intensity of Hg Lines near the Source in Weakly Ionized Mercury Gas Flow
• Ion Bombardment Effect on Hydrogen Content in Boron Thin Films Prepared by Electron Cyclotron Resonance Discharge of Diluted Decaborane Gases
• Theory of Fourier Microfunctions of Several Types (I)
• Sato Hyperfunctions Valued in a Locally Convex Space
• Stationary Fourier Hyperprocesses
• On the Oka-Cartan-Kawai Theorem B for the Sheaf ${}\sp E{\tilde {\cal O}}$ : Dedicated to professor Hisaaki Yoshizawa on his 60th birthday
• On the Theory of Vector Valued Hyperfunctions
• Theory of (Vector Valued) Sato Hyperfunctions. Their Realization as Boundary Values of (Vector Valued) Holomorphic Functions
• Theory of Analytic Linear Mappings, I. General Theory
• Theory of (Vector Valued) Fourier Hyperfunctions. Their Realization as Boundary Values of (Vector Valued) Slowly Increasing Holomorphic Functions, (II)
• Theory of (Vector Valued) Fourier Hyperfunctions. Their Realization as Boundary Values of (Vector Valued) Slowly Increasing Holomorphic Functions, (I)
• Analytic Linear Mappings and Vector Valued Hyperfunctions
• ERROR IN MEASUREMENT OF GAS FLOW RATE IN GAS-SOLIDS TWO-PHASE FLOW BY USE OF A HORIZONTAL DIFFUSER
• New Definition of Products of Distributions
• New Axiom of Quantum Mechanics : Hilbert's 6th Problem
• Theory of Quantum Probability

もっと見る 閉じる

スポンサーリンク