Electron Cyclotron Resonance Discharge of Gas Sublimated from Decaborane by CO_2 Laser Irradiation

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1993-11-15

著者

• NISHIKAWA Masahiro

  Department of Internal Medicine, Ikeda Municipal Hospital

• ITO Yoshifumi

  Department of Material Science, Interdisciplinary Faculty of Science and Engineering, Shimane Univer

• Ito Yoshifumi

  Department Of Electromagnetic Energy Engineering Faculty Of Engineering Osaka University

• KANAZAWA Naoki

  Department of Electromagnetic Energy Engineering, Faculty of Engineering, Osaka University

• TERASAWA Takeshi

  Department of Electromagnetic Energy Engineering, Faculty of Engineering, Osaka University

• Kanazawa Naoki

  Department Of Electromagnetic Energy Engineering Faculty Of Engineering Osaka University

• Terasawa Takeshi

  Department Of Electromagnetic Energy Engineering Faculty Of Engineering Osaka University

• Nishikawa M

  Kent State Univ. Ohio Usa

• Nishikawa Masahiro

  Department Of Biology Graduate School Of Natural Science Konan University

• ITO YOSHIFUMI

  Department of Chemical Engineering, Kyoto University

• Ito Yoshifumi

  Department of Applied Chemistry, Faculty of Engineering, Doshisha University

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