Electron Cyclotron Resonance Discharge of Sublimation Gas of Decaborane and Its Application to Preparation of Boron Thin Films (<Special Issue> Plasma Processing)
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1994-07-30
著者
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NISHIKAWA Masahiro
Department of Internal Medicine, Ikeda Municipal Hospital
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ARAKAWA Takashi
Department of Urology, Kitasato University School of Medicine
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ITO Yoshifumi
Department of Material Science, Interdisciplinary Faculty of Science and Engineering, Shimane Univer
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Arakawa Takashi
Department Of Electromagnetic Energy Engineering Faculty Of Engineering Osaka University
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Ito Yoshifumi
Department Of Electromagnetic Energy Engineering Faculty Of Engineering Osaka University
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SAIDOH Masahiro
Naka Fusion Research Establishment, Japan Atomic Energy Research Institute
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KANAZAWA Naoki
Department of Electromagnetic Energy Engineering, Faculty of Engineering, Osaka University
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Kanazawa Naoki
Department Of Electromagnetic Energy Engineering Faculty Of Engineering Osaka University
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Saidoh M
Naka Fusion Research Establishment Japan Atomic Energy Research Institute
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Nishikawa M
Kent State Univ. Ohio Usa
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Nishikawa Masahiro
Department Of Biology Graduate School Of Natural Science Konan University
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ITO YOSHIFUMI
Department of Chemical Engineering, Kyoto University
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Ito Yoshifumi
Department of Applied Chemistry, Faculty of Engineering, Doshisha University
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