Ion Bombardment Effects on Boron Nitride Film Synthesis by Reactive Sputtering with Electron Cyclotron Resonance Plasmas
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1999-07-30
著者
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Wakatsuchi Masayuki
Graduate School Of Engineering Osaka University
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Ueda Y
Asahi Chemical Industry Co. Ltd.
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Ueda Y
Graduate School Of Engineering Osaka University
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Kanai Kumiko
Graduate School Of Engineering Osaka University
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Takaba Yoshiro
Graduate School of Engineering, Osaka University
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Ueda Yoshio
Graduate School of Engineering, Osaka University
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Nishikawa Masahiro
Graduate School of Engineering, Osaka University
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Nishikawa M
Kent State Univ. Ohio Usa
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Takaba Yoshiro
Graduate School Of Engineering Osaka University
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