Initial Boronization of JT-60U Tokamak Using Decaborane
スポンサーリンク
概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1993-07-15
著者
-
Sugie Tatsuo
Japan Atomic Energy Research Institute
-
Arai T
Kanagawa Inst. Technol. Atsugi Jpn
-
Sugai Hideo
Nagoya University
-
Sakasai Akira
Japan Atomic Energy Research Institute Naka Fusion Research Establishment
-
Koike T
Toshiba Corp. Yokohama Jpn
-
Shimada M
Ntt Microsystem Integration Lab. Kanagawa Jpn
-
Shimada M
Hiroshima Univ. Higashi‐hiroshima
-
ASAKURA Nobuyuki
Japan Atomic Energy Agency, Naka, Ibaraki 311-0193 Japan
-
NINOMIYA Hiromasa
Japan Atomic Energy Research Institute
-
SHIMADA Michiya
Japan Atomic Energy Research Institute
-
SAIDOH Masahiro
Japan Atomic Energy Research Institute, Naka Fusion Research Establishment
-
OGIWARA Norio
Japan Atomic Energy Research Institute, Naka Fusion Research Establishment
-
ARAI Takashi
Japan Atomic Energy Research Institute, Naka Fusion Research Establishment
-
HIRATSUKA Hajime
Japan Atomic Energy Research Institute, Naka Fusion Research Establishment
-
KOIKE Tsuneyuki
Japan Atomic Energy Research Institute, Naka Fusion Research Establishment
-
SHIMIZU Masatsugu
Japan Atomic Energy Research Institute, Naka Fusion Research Establishment
-
NAKAMURA Hiroo
Japan Atomic Energy Research Institute, Naka Fusion Research Establishment
-
JIMBOU Ryutarou
Japan Atomic Energy Research Institute, Naka Fusion Research Establishment
-
YAGYU Jyunichi
Japan Atomic Energy Research Institute, Naka Fusion Research Establishment
-
YAMAGE Masashi
Nagoya University
-
JACKSON Gary
General Atomics
-
Ogiwara N
Japan Atomic Energy Research Institute Naka Fusion Research Establishment
-
Ogiwara Norio
Japan Atomic Energy Agency
-
Yagyu Jyunichi
Japan Atomic Energy Research Institute Naka Fusion Research Establishment
-
Nakamura Hiroo
Japan Atomic Energy Research Institute
-
Nakamura Hiroo
Japan Atomic Energy Research Institute Naka Fusion Research Establishment
-
Shimada M
Graduate School Of Natural Science And Technology Kanazawa University
-
SAIDOH Masahiro
Naka Fusion Research Establishment, Japan Atomic Energy Research Institute
-
Saidoh M
Naka Fusion Research Establishment Japan Atomic Energy Research Institute
-
Saidoh Masahiro
Japan Atomic Energy Research Institute
-
Koike T
Shizuoka Univ. Shizuoka Jpn
-
Asakura Nobuyuki
Japan Atomic Energy Research Institute Naka Fusion Research Establishment
-
Ninomiya Hiromasa
Japan Atomic Energy Research Institute Naka Fusion Research Establishment
-
Jimbou Ryutarou
Japan Atomic Energy Research Institute Naka Fusion Research Establishment
-
Shimizu Masatsugu
Japan Atomic Energy Research Institute Naka Fusion Research Establishment
-
Arai Takashi
Japan Atomic Energy Research Institute Naka Fusion Research Establishment
-
SUGIE Tatsuo
Japan Atomic Energy Research Institute, Naka Fusion Research Establishment
-
SAKASAI Akira
Japan Atomic Energy Research Institute, Naka Fusion Research Establishment
-
ASAKURA Nobuyuki
Japan Atomic Energy Agency
-
SUGIE Tatsuo
Japan Atomic Energy Agency, Naka, Ibaraki 311-0193, Japan
-
SHIMIZU Masatsugu
Japan Atomic Energy Research Institute
-
NAKAMURA Hiroo
Japan Atomic Energy Agency
関連論文
- 周波数シフトプローブを用いたプラズマ計測
- IUVSTA Scientific and Technical Divisions (STD) の報告
- マイクロ波励起高密度プラズマを用いたPTFEフィルムの表面改質
- 周波数シフトプローブにおける膜堆積の影響
- 周波数シフトプローブの電子温度計測への応用
- 周波数シフトプローブを用いた電子密度測定におけるプローブ形状の影響
- デュアル表面波プローブを用いた電子密度・電子温度の計測
- プラズマイオン注入における平板ターゲットの二次電子放出率の計測
- 29pA10P プラズマからの真空紫外光とプラズマイオン注入における二次電子放出係数(プラズマ基礎・応用)
- 半導体検出器を用いたプラズマイオン注入における二次電子計測
- 27aA04 プラズマ吸収プローブを用いた有磁場プラズマの密度測定(プラズマ基礎・応用)
- 高周波バイアスを用いた高密度プラズマエッチャー内壁における膜堆積抑制
- イオン衝撃による酸化膜エッチャーの壁制御
- 26aB6 新しい高周波バイアス法による壁制御とエッチングへの応用(ヘリカル/プラズマ応用)
- 23aB35P リチウムコンディショニングによるグラファイトの水素リテンション抑制効果の基礎実験(真空・第一壁・材料, (社) プラズマ・核融合学会第21回年会)
- ジャイアントプラズマプロセス : 低圧から大気圧プロセスまで
- TK06 新しいプラズマ基礎技術の開発研究(プラズマ応用における最近の進展, (社) プラズマ・核融合学会第21回年会)
- 2 プラズマ材料プロセスにおける壁の影響と制御(シンポジウムXI : 低温プラズマと壁)
- シンポジウム : 中部地区若手・中堅研究者の挑戦
- 29pA17P シリコン酸化用表面波プラズマの特性と酸素ラジカル制御(プラズマ基礎・応用)
- 29pA16 マイクロ波スロット励起プラズマの高効率化・高圧力化(プラズマ基礎・応用)
- プラズマ吸収プローブによるプロセスプラズマの電子密度測定
- 29pA32P 表面波プラズマを用いたDLC膜の低温形成とその電界電子放出特性(プラズマ壁相互作用・材料/電源・マグネット)
- 25aB04 リチウムコーティングによるグラファイトの水素リテンション抑制の検討(真空・第一壁・材料)
- 28aB04 グラファイト損耗のリチウムによる抑制機構(プラズマ壁相互作用・材料)
- Spectroscopic Measurements of Impurities in the Upgraded DIVA Tokamak Plasma
- Absolute Calibration of a Grazing-Incidence Vacuum Monochromator by Means of Tokamak Discharges
- Ion Temperature Characteristics of Upgraded DIVA
- Doppler Temperature and Particle Confinement Time Determined from Measurements of H_α-Line on a Tokamak Plasma in the JFT-2a Device
- Determination of Electron Temperatures during Initial Phases of Tokamak Discharges by an Improved Time-History Method of Spectral Lines
- Loss Mechanism of Energetic Ions Produced during the Lower Hybrid Heating of JFT-2 Tokamak
- Parametric Heating by Radio-Frequency near the Lower Hybrid Frequency in the JFT-2 Tokamak
- 反応性プロセシングプラズマにおける電子密度測定用平板型マイクロ波共振器プローブとシース効果
- Impurity Behavior during the H-Mode in JFT-2M
- Ion Bernstein Wave Experiment on JFT-2M Tokamak
- Enhancement of Wall Fueling and Improvement in nτ of a Beam-Heated H-Mode Discharge by Electron Cyclotron Wave in the JFT-2M Tokamak
- Measurement of Peripheral Electron Temperature by Electron Cyclotron Emission during the H-Mode Transition in JFT-2M Tokamak
- Scrape-off Layer Plasma Flow in L- and H-Mode Plasmas on JT-60U
- Tokamak Circuit
- Metal Impurity Behaviour in DIVA Determined Using a Blow-Off Technique
- Divertor Experiment for Impurity Control in DIVA
- H-Mode Outside Divertor Free from Peripheral Disruption in Doublet III
- Plasma Shapes for Achieving High Heating Efficiency during Neutral Beam Injection in Doublet III
- Ion Temperature Measurement with Spectroscopy in JT-60
- Scaling of Edge Magnetic Fluctuations In DIII-D L-Mode
- Electron Cyclotron Resonance Plasma Etching of α-Ta for X-Ray Mask Absorber Using Chlorine and Fluoride Gas Mixture
- Development of Highly Accurate X-Ray Mask with High-Density Patterns
- Electron Cyclotron Heating and Pre-Ionization in the JFT-2 Tokamak
- Observation of Non-Circular Cross-Section for q=1 Magnetic Surface in Very Low-q Discharge (q_a≲2) of DIVA Tokamak
- Application of Multigrid Energy Analyzer to the Scrape-Off Layer Plasma in DIVA
- 反応性プロセシングプラズマにおける電子密度測定用平板型マイクロ波共振器プローブとシース効果
- Co/Cu及びPt/Co多層膜における構造と磁気特性のスパッタガス依存性
- Co/Cu及びPt/Co多層膜における構造と磁気特性のスパッタガス依存性(磁気記録とその展開)
- マグネトロンスパッタリングにおける高エネルギー粒子の発生過程と計測
- Initial Boronization of JT-60U Tokamak Using Decaborane
- Wall Heating Effect on Crystallization of Low-Temperature Deposited Silicon Films from an Inductuvely-Coupled Plasma
- High Speed Cleaning of Boronized Wall with a CF_4 Containing Plasma
- Precursors in Atmospheric-Pressure Chemical Vapor Deposition of Silica Films from Tetraethylorthosilicate/Ozone System
- Particle Generation and Film Formation in an Atmospheric-Pressure Chemical Vapor Deposition Reactor Using the Tetraethylorthosilicate (TEOS)/He, TEOS/O_2/He, and TEOS/O_3/He Systems
- Gas-Phase Nucleation in an Atmospheric Pressure Chemical Vapor Deposition Process for SiO_2 Films Using Tetraethylorthosilicate (TEOS)
- Study of Runaway Electron Transport in Edge Stochastic Magnetic Field in the JFT-2M Tokamak
- Edge Pedestal During the H-Mode of a Tokamak Plasma Measured by the Electron Cyclotron Emission
- 4 プロセスプラズマの計測(シンポジウムVII : 慣性核融合炉実現の条件と課題)
- Dramatic Improvement of Surface Wave Plasma Performance Using a Corrugated Dielectric Plate : Nuclear Science, Plasmas, and Electric Discharges
- 4. 電子エネルギー分布関数とラジカル組成 (電子エネルギー分布関数とプラズマプロセス)
- プロセス用プラズマにおける励起周波数の効果
- 単純トーラス
- 材料プロセス用プラズマ技術の動向と課題(シンポジウムI : プラズマ応用技術のフロンティア)
- Dependence of Fluorocarbon Plasma Chemistry on the Electron Energy Distribution Function
- Molybdenum, Carbon and Silicon Carbide Limiter Experiment in the JFT-2 Tokamak
- Dependence of Electrically Induced Strain on Orientation and Composition in Pb(Zr_xTi_)O_3 Films
- Structure and Piezoelectric Properties of 0.9 Pb(Zr,Ti)O_3-0.1 Pb(Mg,Nb)O_3 Films Prepared by Metalorganic Deposition Process
- Comparative Study of Defect Densities Evaluated by Electron Spin Resonance and Constant Photocurrent Method in Undoped and N-Doped Hydrogenated Amorphous Silicon
- Photocreated Defects in Very Thin Hydrogenated Amorphous Silicon Films : Semiconductors
- Relation between Electron-Spin-Resonance and Constant-Photocurrent-Method Defect Densities in Hydrogenated Amorphous Silicon
- A Simple Model of Supersonic Molecular Beam Injection
- Light-Intensity Dependence of Photocreated Defects in Hydrogenated Amorphous Silicon-Nitrogen Alloy Films
- Equilibrium Plasma Position Control for a Large Tokamak Using Modern Control Theory
- Electron Heat Conduction Coefficients at the Temperature Rise Phase and the Internal Disruption during the Sawtooth Oscillation of Tokamak
- 27aC14P Ar/SF_6プラズマの平板プローブ測定におけるエッジ効果による正イオン電流補正(プラズマ基礎・応用)
- Thomson Scattering Measurements on Ohmically Heated Plasmas in the JFT-2 Tokamak
- SIZE CHANGE OF VERY FINE SILVER AGGLOMERATES BY SINTERING IN A HEATED FLOW
- Wall Deposition of Ultrafine Aerosol Particles by Thermophoresis in Nonisothermal Laminar Pipe Flow of Different Carrier Gas
- A 2-mm Wave Digital Interferometer for Tokamak Discharages in the Upgraded DIVA
- ICONE11-36288 OPTICAL MEASUREMENT OF WAVES ON HIGH-SPEED LITHIUM JET SIMULATING IFMIF TARGET FLOW
- Surface-Wave Sustained Plane Plasmas : Theory and Experiments
- Frequency Control Method of Magnetostatic Wave Oscillators Using External pin Diode Circuits
- Simulation of Magnetostatic Wave Envelope Soliton Propagation in Yttrium Iron Garnet Films
- プラズマ中での高エネルギー電子ビームの発生と In-situ 表面モニタリングへの応用
- Wall Temperature Dependence of Boronization Using Decaborane and Diborane
- Characteristics of a Discretely Weighted Conical Transducer for Generation of Limited Diffraction Beams
- Theoretical Study on Discretely Weighted Comical Tansducers
- Effect of OH Content on the Far-Infrared Absorption and Nature of the Boson Peak in Silica Glass
- 1. はじめに (電子エネルギー分布関数とプラズマプロセス)
- Estimations of Plasma Position and β_p+l_i/2 from Magnetic Measurements under High-β Conditions in JET-2
- 周波数シフトプローブを用いた電子状態のモニタリング
- プラズマ環境下にある窒化ガリウム膜のフォトルミネッセンス観測
- 電子状態モニタ用マイクロ波共振器プローブの小型化
- Blanket Concept of Water-Cooled Lithium Lead with Beryllium for the SlimCS Fusion DEMO Reactor
- Absolute Calibration of a Normal Incidence Vacuum Spectrometer Using Synchrotron Radiation