Two-Dimensional Distributions of Ti and Ti+ Densities in High-Pressure Magnetron Sputtering Discharges
スポンサーリンク
概要
- 論文の詳細を見る
We measured two-dimensional distributions of Ti and Ti+ densities in magnetron sputtering plasmas by laser-induced fluorescence (LIF) imaging spectroscopy. It has been found that the production of Ti+ is enhanced by a high gas pressure. The peak of the Ti+ density is located at a distance of 4–5 cm from the target surface, indicating the gas-phase production of Ti+ in the downstream plasma. Since the plasma density and the electron temperature measured using a Langmuir probe are low in the downstream plasma, this result suggests that the dominant production process of Ti+ is not electron impact ionization of Ti ($\text{Ti}+\text{e}\rightarrow\text{Ti$^{+}$e}+\text{e}$). Although another candidate for the gas-phase production of Ti+ is Penning ionization ($\text{Ti}+\text{Ar$^{\text{M}}$}\rightarrow\text{Ti$^{+}$}+\text{Ar}+\text{e}$), experimental results on ArM is negative about the contribution of Penning ionization to the gas-phase production of Ti+.
- 2005-05-10
著者
-
NAFARIZAL Nayan
Department of Electrical Engineering and Computer Science, Nagoya University
-
SHIBAGAKI Kanji
Department of Electrical and Electronic Engineering, Suzuka National College of Technology
-
SAGO Yasumi
ANELVA Corporation
-
Takada Noriharu
Department Of Electrical Engineering And Computer Science Nagoya University
-
Sasaki Koichi
Department Of Electrical Engineering And Computer Science Nagoya University
-
Nakamura Keiji
Department Of Biology And Geosciences Graduate School Of Science Osaka City University:present Addre
-
Sago Yasumi
ANELVA Corporation, Fuchu, Tokyo 183-8508, Japan
-
Nafarizal Nayan
Department of Electrical Engineering and Computer Science, Nagoya University, Nagoya 464-8603, Japan
-
Shibagaki Kanji
Department of Electrical and Electronic Engineering, Suzuka National College of Technology, Suzuka, Mie 510-0294, Japan
-
SASAKI Koichi
Department of Architecture, Faculty of Engineering, Tohoku University
関連論文
- Plasma Absorption Probe for Measuring Electron Density in an Environment Soiled with Processing Plasmas
- Diagnostic of Surface Wave Plasma for Oxide Etching in Comparison with Inductive RF Plasma
- Analytical Expression Based Design of a Low-Voltage FD-SOI CMOS Low-Noise Amplifier(Analog Circuit Techniques and Related Topics)
- Space- and Time-Resolved Measurements of Negative Ions in a Pulsed Inductively-Coupled Plasma in Chlorine
- A New Technology for Negative Ion Detection and the Rapid Electron Cooling in a Pulsed High-Density Etching Plasma
- Formation of C_2 Radicals in High-Density C_4F_8 Plasmas Studied by Laser-Induced Fluorescence
- Enhancement of Surface Productions of CF_x Radicals by the Addition of H_2 into CF_4 Plasmas
- Loss Processes of F Atoms in Low-Pressure, High-Density CF_4 Plasmas with the Admixture of H_2
- Surface Kinetics of CF_x Radicals and Fluorine Atoms in the Afterglow of High-Density C_4F_8 Plasmas
- Lifetime Measurements of CF_x Radicals and H Atoms in Afterglow of CF_4/H_2 Plasmas
- Loss Processes of CF and CF_2 Radicals in the Afterglow of High-Density CF_4 Plasmas
- Two-Dimensional Distributions of Ti and Ti^+ Densities in High-Pressure Magnetron Sputtering Discharges
- Estimation of Carbon Fluxes Interchanging between Chamber Wall and Gas Phase in Fluorocarbon Plasmas
- Synthesis of Heavy Carbon Clusters by Laser Ablation in Vacuum
- Formation of Positive and Negative Carbon Cluster Ions in the Initial Phase of Laser Ablation in Vacuum
- Role of Reaction Products in F^- Production in Low-Pressure, High-Density CF_4 Plasmas
- Diagnostics of Fluorine Negative Ions by Laser Photodetachment Combined with a Heated Probe in High-Density CF_4 Plasmas
- Ultra-Sensitive Measurement of Sheath Electric Fields by Laser-Induced Fluorescence-Dip Spectroscopy
- Experimental Study of the Spectral Characteristics of a High Power, Pulsed D_2O Laser for Application to Plasma Diagnostics
- Cross Section Measurements for Electron-Impact Dissociation of CHF_3 into Neutral and Ionic Radicals
- Environmental regulation of abult diapause of Graphosoma rubrolineatum (Westwood) (Heteroptera : Pentatomidae) in southern and northern populations of Japan
- Right Paranephric Abscess as a Rare Late Complication of Laparoscopic Cholecystectomy
- High-Speed Etching of Indium-Tin-Oxide Thin Films Using an Inductively Coupled Plasma ( Plasma Processing)
- Time-of-Flight Mass Spectrometry of Positive Ions in Helicon-Wave Excited High-Density CF_4 and C_4F_8 Plasmas
- Characteristics of Fluorine Negative Ions in Helicon-Wave Excited High-Density Carbon-Tetrafluoride Plasmas (負イオン特集)
- Effects of photoperiod and temperature on the induction of adult diapause in Dolycoris baccarum (L.) (Heteroptera: Pentatomidae) from Osaka and Hokkaido, Japan
- Growth Processes of Nanoparticles in Liquid-Phase Laser Ablation Studied by Laser-Light Scattering
- Effect of Pressurization on the Dynamics of a Cavitation Bubble Induced by Liquid-Phase Laser Ablation
- Early Gastric Cancer Manifested as Brain Metastasis: Report of a Case
- Bile Peritonitis Due to a Spontaneous Perforation of the Common Bile Duct : Report of a Case
- Temporal Variations in Densities of Y, Ba, and Cu Atoms in Magnetron Sputtering Plasmas with YBaCuO Target
- Production of Carbon Clusters Using Plasma Chemical Vapor Deposition in He/CH_4 Glow Discharge
- Numerical Study on Mode Structure of an Optically-Pumped 385 μm D_2O Laser
- Two-Frequency Operation of a Hybrid TEA CO_2 Laser and Its Application to Two-Frequency Pulse Injection Locking
- Pulse Injection-Locked TEA CO_2 Laser for Long Pulse Operation with Feedback Stabilization
- Theoretical Model and Numerical Simulation of Two-Longitudinal-Mode Oscillation in an Injection-Locked TEA CO_2 Laser
- Comparison of the Fluorine Atom Density Measured by Actinometry and Vacuum Ultraviolet Absorption Spectroscopy
- Decay Processes of Electrons in the Afterglow of High-Density CF_4, c-C_4F_8 and CF_4-H_2 Plasmas
- Collisional Quenching of C_2(d^3Π_g) and C^3(A^1〜Π_u) and Its Application to the Estimation of Absolute Particle Density in Laser-Ablation Carbon Plumes
- Ar/O_2 gas pressure dependence of atomic components of zirconia prepared by intermittent zirconium arc PBII&D
- Radical Control by Wall Heating of a Fluorocarbon Etching Reactor
- Absolute Fluorine Atom Densities in Fluorocarbon High-Density Plasmas Measured by Appearance Mass Spectrometry
- Observation of Stark Spectra of Argon High Rydberg States in Well-Defined Electric Fields by Laser-Induced Fluorescence-Dip Spectroscopy
- Correlation between Metastable and Ground-State Fluorine Atom Densities Measured by Laser-Induced Fluorescence and Vacuum Ultraviolet Absorption Spectroscopies : Nuclear Science, Plasmas, and Electric Discharges
- Measurements of Rotational Temperature and Density of Molecular Nitrogen in Spark-Plug Assisted Atmospheric-Pressure Microwave Discharges by Rotational Raman Scattering
- Temporal and Spatial Variations in Electron Density and Blackbody Temperature in the Initial Phase of a Laser Ablation BN Plasma
- Power Transmission by Using Laser Beams
- Improvement of a Corona-Preionized TEA-CO_2 Laser by Means of High-Frequency Corona Discharge
- Deposition of Tungsten Carbide Thin Films by Simultaneous RF Sputtering
- Resonant Directional Excitation of Helicon Waves by a Helical Antenna
- Hot Spots and Electron Heating Processes in a Helicon-Wave Excited Plasma
- Dynamic Variation of the Sticking Coefficient of Oxygen Atoms in Helicon-Wave Excited High-Density Oxygen Plasmas
- Numerical Simulation of Elongating the Pulse Duration of a TEA CO_2 Laser
- CEREBRAL ACTING MAPS OF HYDRALAZINE, CLONIDINE, AND α-METHYLDOPA IN SPONTANEOUSLY HYPERTENSIVE RATS AS DEMONSTRATED BY THE 14C-DEOXY-D-GLUCOSE METHOD
- INFLUENCE OF ION-INDUCED RADICAL DESORPTION FROM FLUOROCARBON DEPOSITS IN A HIGH DENSITY PLASMAS
- Effects of Environmental Factors on Diapause Development and Postdiapause Oviposition in a Phytophagous Insect, Dybowskyia reticulata
- Modeling Microwave Resonance of Curling Probe for Density Measurements in Reactive Plasmas
- Dramatic Enhancement of OH(A2Σ+) Density in a Recombining Hydrogen Plasma
- Modification of Fluorinated Al2O3 Surface by Irradiating H2 and O2 Plasmas
- Proteolysis of Human Tumor Necrosis Factor (TNF) by Endo- and Expeptidases : Process of Proteolysis and Formation of Active Fragments
- Some Aspects of the Reproductive Biology of the Swimming Crab, Ovalipes punctatus (DE HAAN), in Sendai Bay and its Adjacent Waters
- INFLUENCE OF SINO-AORTIC BARORECEPTOR DENERVATION ON CATECHOLAMINES, CATECHOLAMINE-SYNTHESIZING ENZYMES AND CHOLINE ACETYLTRANSFERASE ACTIVITY IN THE BRAINSTEM NUCLEI OF THE RAT
- BEHAVIORAL AND NEUROCHEMICAL CHANGES FOLLOWING ADMINISTRATION OF 6-HYDROXYDOPAMINE INTO THE VENTRAL TEGMENTAL AREA OF THE MIDBRAIN
- Course of NTX changes under continuous bisphosphonate treatment in cases of NTX over-reduction due to long-term treatment with bisphosphonates
- Two-Dimensional Distributions of Ti and Ti+ Densities in High-Pressure Magnetron Sputtering Discharges
- Investigations of Production Processes of Ti+ in High-Pressure Magnetron Sputtering Plasmas
- Development of a Compact Divertor Simulator Excited by Helicon-Wave Discharge
- New Inductive rf Discharge Using an Internal Metal Antenna
- Fecundity of the Sakhalin Surf Clam, Spisula sachalinensis (SCHRENCK), in Sendai Bay
- Control of Plasma and Cavitation Bubble in Liquid-Phase Laser Ablation Using Supersonic Waves
- Modification of Rayleigh–Plesset Theory for Reproducing Dynamics of Cavitation Bubbles in Liquid-Phase Laser Ablation
- Tubulointerstitial nephritis and uveitis syndrome with transient hyperthyroidism in an elderly patient
- RELATIONSHIP BETWEEN CEREBRAL ENERGY FAILURE AND FREE FATTY ACID ACCUMULATION FOLLOWING PROLONGED BRAIN ISCHEMIA
- Growth of the Sakhalin Surf Clam, Spisula sachalinensis (SCHRENCK), in Sendai Bay
- Spatial Distribution of H Atom Density in High-Density, Helicon-Wave H2 Plasmas Measured by Laser-Induced Fluorescence
- Measurements of Gas Temperature in High-Density Helicon-Wave H2 Plasmas by Diode Laser Absorption Spectroscopy
- Electron Density Range Measurable by Microwave Resonator Probe with Higher Mode Resonance
- Composition of Positive Ions in High-Density H2 Plasmas Measured by Time-of-Flight Mass Spectrometry
- Production of Radicals and Particulates by Interaction between High-Density Hydrogen Plasma and Graphite Plate
- Dynamic Variation of the Sticking Coefficient of Oxygen Atoms in Helicon-Wave Excited High-Density Oxygen Plasmas
- Opto-Curling Probe for Simultaneous Monitoring of Optical Emission and Electron Density in Reactive Plasmas
- Temporal Variations in Densities of Y, Ba, and Cu Atoms in Magnetron Sputtering Plasmas with YBaCuO Target
- Dynamics of Laser-Ablation Plume and Ambient Gas Visualized by Laser-Induced Fluorescence Imaging Spectroscopy
- A Case of Nephrocalcinosis Associated with Primary Aldosteronism
- Temporal Variations in Distributions of NO and NO2 Densities in Streamer Corona Discharges
- Effects of trimoprostil on healing and recurrence of acetic acid-induced gastric ulcer in rats.
- Interaction of prostaglandin E2 and bradykinin in the induction of afferent splanchnic nerve discharges in cats.
- 503 RELATIONSHIP BETWEEN CEREBROVASCULAR DISEASE AND INDOOR THERMAL ENVIRONMENT IN TWO SELECTED TOWNS IN MIYAGI PREFECTURE, JAPAN
- Effects of clonidine, .ALPHA.-methyldopa and hydralazine on met-enkephalinergic neurons in cerebral nuclei of spontaneously hypertensive rats.
- Removal of Water Pollutants by Pulsed Discharge Plasma and Observation of Its Optical Emission Intensity at Atmospheric Pressure
- Ca++ and Morphological Changes in Erythrocytes of stroke-prone SHR
- Influence of Clonidine, α-Methyldopa and Hydralazine on Noradrenergic and Adrenergic Neuronal Activities in Brainstem Nuclei of Spontaneously Hypertensive Rats
- Effect of Water Pressure on Size of Nanoparticles in Liquid-Phase Laser Ablation
- Alteration of Met-enkephalin Levels in Adrenals and Sympathetic Ganglia in Response to Acute Alteration of Blood Pressure in Conscious SHR and WKY
- Simultaneous determination of vascular and plasma levels of angiotensins and kinins by using radioimmunoassay in combination with gradient reversedphase HPLC
- A Simple Method for Efficient Generation of Standing Cavitation Bubbles
- Decreased Levels of Substance P (SP)- and Methionine Enkephalin (ME)-like Immunoreactivities in Sympathetic Ganglia of Spontaneously Hypertensive Rats
- Formation of Positive and Negative Carbon Cluster Ions in the Initial Phase of Laser Ablation in Vacuum
- Removal of Water Pollutants by Pulsed Discharge Plasma and Observation of Its Optical Emission Intensity at Atmospheric Pressure (Special Issue : Advanced Plasma Science and Its Applications for Nitrides and Nanomaterials)
- Activation of Central Noradrenergic and Adrenergic Neurons in Young and Adult Spontaneously Hypertensive Rats