Characteristics of Fluorine Negative Ions in Helicon-Wave Excited High-Density Carbon-Tetrafluoride Plasmas (負イオン特集)

スポンサーリンク

概要

• 論文の詳細を見る

• Negative ion behavior in helicon-wave excited high-density carbon-tetrafluoride (CF_4) plasmas was examined with a time-of-flight mass spectrometer. As a result of mass spectrum measurements, only fluorine negative ions (F^-) were observed ,in afterglow plasmas as the negative ion species. The F^- density increased immediately after the termination of the rf power into the plasma. During this period, the electron density decreased rapidly with a decay time constant of less than 20 μs. The experimental results of the relation between the F^- and electron densities showed several inconsistencies with the assumption that F^- was mainly produced by dissociative electron attachment to CF_4. In the present study, dissociative electron attachment to CF_3 radicals is proposed as a production process of F^- in low-temperature afterglow plasmas. In addition, pulse modulation of the rf power was tried to enhance the production of F^-. Negative ions were obtained in each afterglow phase in the pulse-modulated plasma, resulting in the increase of the sum total of F^- during the entire discharge duration.

• 社団法人プラズマ・核融合学会の論文
• 1996-11-25

著者

• SASAKI Koichi

  Department of Electronics, Nagoya University

• KADOTA Kiyoshi

  Department of Electronics, Nagoya University

• Sasaki Koichi

  Department Of Electronics Nagoya University

• Kadota K

  Department Of Electronics Nagoya University

• Kadota Kiyoshi

  Department Of Electronics Nagoya University

• URA Kenichiro

  Department of Electronics, Nagoya University

• 佐々木 浩一

  Department Of Electronics Nagoya University

• Sasaki Koichi

  Department Of Electrical Engineering And Computer Science Nagoya University

• Ura Kenichiro

  Department Of Electronics Nagoya University:(present Address)device Development Center Canon Inc.

• 浦 賢一郎

  Department of Electronics, Nagoya University

• 門田 清

  Department of Electronics, Nagoya University

関連論文

• Composition of Positive Ions in High-Density H_2 Plasmas Measured by Time-of-Flight Mass Spectrometry
• Observation of the Electric Field Structure in the Sheath of Electronegative Plasmas by Laser-Induced Fluorescence-Dip Spectroscopy
• 25pB02 アルゴンをプローブ粒子としたレーザー誘起蛍光減光法による超高感度電界計測(プラズマ基礎・応用I)
• 25aPS-70 微小球共振器に結合したCdSe/ZnS量子ドットの蛍光解析(25aPS 領域5ポスターセッション,領域5(光物性))
• 26aRB-10 4光子を用いた超解像度位相測定(26aRB 量子エレクトロニクス(量子光学),領域1(原子・分子,量子エレクトロニクス,放射線物理))
• 23pQD-3 高精度評価系による、光制御ノットゲートのエラー解析II(量子エレクトロニクス(量子光学,微小共振器),領域1,原子・分子,量子エレクトロニクス,放射線物理)
• 23pQD-4 独立した伝令付き単一光子源によるHong-Ou-Mandelディップ(量子エレクトロニクス(量子光学,微小共振器),領域1,原子・分子,量子エレクトロニクス,放射線物理)
• 23pRH-14 高精度評価系による、光制御ノットゲートのエラー解析(量子エレクトロニクス(量子光学),領域1,原子・分子,量子エレクトロニクス,放射線物理)
• 24pRG-7 非局所量子フィルタの検証実験(量子エレクトロニクス(量子情報),領域1,原子・分子,量子エレクトロニクス,放射線物理)
• 21pXK-2 Hong-Ou-Mandel型干渉による2光子状態のモード同一度測定(量子エレクトロニクス(量子光学),領域1,原子・分子,量子エレクトロニクス,放射線物理)
• 21pXK-3 多光子干渉を用いた位相測定と標準量子限界(量子エレクトロニクス(量子光学),領域1,原子・分子,量子エレクトロニクス,放射線物理)
• レーザーアブレーションの実験技術 : 計測技術を中心として
• エレクトロニクスとプラズマ (ナノテクとプラズマ)
• 1 反応性プラズマのレーザー分光計測(プラズマの基礎・応用研究最前線(中部地区若手・中堅研究者の挑戦))
• 1 Introductory Talk : 拡大するレーザーアブレーション研究とその応用(シンポジウムVI : レーザーアブレーションプラズマの基礎と応用)
• 27aSD-7 低温でのテーパーファイバーと微小球共振器とのカップリング(27aSD 量子エレクトロニクス(若手奨励賞受賞講演・近接場量子光学),領域1(原子・分子,量子エレクトロニクス,放射線物理))
• ファイバー結合微小球共振器を用いた固体量子位相ゲートの実現に向けて
• 23pQD-13 テーパファイバ結合微小球共振器の共鳴モードにおける光位相シフト(量子エレクトロニクス(量子光学,微小共振器),領域1,原子・分子,量子エレクトロニクス,放射線物理)
• 21aRH-10 ファイバー結合微小球共振器における自然放出結合係数の制御(量子エレクトロニクス(高強度レーザー・コヒーレント過渡現象・微小共振器),領域1,原子・分子,量子エレクトロニクス,放射線物理)
• 20pXK-5 Er, Al, P含有ゾルゲルガラスでコートしたテーパーファイバー結合微小球レーザーの発振特性(量子エレクトロニクス(量子光学),領域1,原子・分子,量子エレクトロニクス,放射線物理)
• 欠陥領域を用いたランダム構造内の局在モード特性制御
• Structural Properties of Heavily B-Doped SiGe Thin Films for High Thermoelectric Power
• 21pXK-4 回折限界を超えた量子リソグラフィーの実証実験II(量子エレクトロニクス(量子光学),領域1,原子・分子,量子エレクトロニクス,放射線物理)
• 26aRB-9 回折限界を超えた量子リソグラフィーの実証実験(26aRB 量子エレクトロニクス(量子光学),領域1(原子・分子,量子エレクトロニクス,放射線物理))
• ランダム媒質のレーザー発振および局在モードの数値解析
• Formation of C_2 Radicals in High-Density C_4F_8 Plasmas Studied by Laser-Induced Fluorescence
• Enhancement of Surface Productions of CF_x Radicals by the Addition of H_2 into CF_4 Plasmas
• Loss Processes of F Atoms in Low-Pressure, High-Density CF_4 Plasmas with the Admixture of H_2
• Surface Kinetics of CF_x Radicals and Fluorine Atoms in the Afterglow of High-Density C_4F_8 Plasmas
• Lifetime Measurements of CF_x Radicals and H Atoms in Afterglow of CF_4/H_2 Plasmas
• Loss Processes of CF and CF_2 Radicals in the Afterglow of High-Density CF_4 Plasmas
• Two-Dimensional Distributions of Ti and Ti^+ Densities in High-Pressure Magnetron Sputtering Discharges
• Estimation of Carbon Fluxes Interchanging between Chamber Wall and Gas Phase in Fluorocarbon Plasmas
• Synthesis of Heavy Carbon Clusters by Laser Ablation in Vacuum
• Spatial Distribution of H Atom Density in High-Density, Helicon-Wave H_2 Plasmas Measured by Laser-Induced Fluorescence
• Formation of Positive and Negative Carbon Cluster Ions in the Initial Phase of Laser Ablation in Vacuum
• Role of Reaction Products in F^- Production in Low-Pressure, High-Density CF_4 Plasmas
• Diagnostics of Fluorine Negative Ions by Laser Photodetachment Combined with a Heated Probe in High-Density CF_4 Plasmas
• Ultra-Sensitive Measurement of Sheath Electric Fields by Laser-Induced Fluorescence-Dip Spectroscopy
• Experimental Study of the Spectral Characteristics of a High Power, Pulsed D_2O Laser for Application to Plasma Diagnostics
• ナノギャップ局在プラズモンの直接観察 (特集 世界をリードするプラズモニクス研究と応用)
• Right Paranephric Abscess as a Rare Late Complication of Laparoscopic Cholecystectomy
• Efficient Production of O^- by Dissociative Attachment of Slow Electrons to Highly Excited Metastable Oxygen Molecules
• Time-of-Flight Mass Spectrometry of Positive Ions in Helicon-Wave Excited High-Density CF_4 and C_4F_8 Plasmas
• Characteristics of Fluorine Negative Ions in Helicon-Wave Excited High-Density Carbon-Tetrafluoride Plasmas (負イオン特集)
• Neutralization Method for detection of Metastable Ions and Its Application to the Production of Metastable Rare Gas Ions by Electron Impact
• Early Gastric Cancer Manifested as Brain Metastasis: Report of a Case
• Bile Peritonitis Due to a Spontaneous Perforation of the Common Bile Duct : Report of a Case
• Temporal Variations in Densities of Y, Ba, and Cu Atoms in Magnetron Sputtering Plasmas with YBaCuO Target
• 26aRB-11 周波数もつれ合いのHong-Ou-Mandel干渉への影響(26aRB 量子エレクトロニクス(量子光学),領域1(原子・分子,量子エレクトロニクス,放射線物理))
• Development of a Compact Divertor Simulator Excited by Helicon-Wave Discharge
• Numerical Study on Mode Structure of an Optically-Pumped 385 μm D_2O Laser
• Two-Frequency Operation of a Hybrid TEA CO_2 Laser and Its Application to Two-Frequency Pulse Injection Locking
• Pulse Injection-Locked TEA CO_2 Laser for Long Pulse Operation with Feedback Stabilization
• Theoretical Model and Numerical Simulation of Two-Longitudinal-Mode Oscillation in an Injection-Locked TEA CO_2 Laser
• Formation of Metastable State Molecular Ions by Electron Impact of N_2, CO, O_2 and NO
• Space-Resolved Measurement of Electron Density by Neutral Li Beam Probing in NBT
• Measurement of the Magnetic Field in a Plasma Using an Impurity Probe Spectroscopy
• The Hydrogen Balmer-α Line Profile in RF-Discharge Plasmas
• Plasma Diagnostics by Neutral Beam Probing
• Comparison of the Fluorine Atom Density Measured by Actinometry and Vacuum Ultraviolet Absorption Spectroscopy
• Decay Processes of Electrons in the Afterglow of High-Density CF_4, c-C_4F_8 and CF_4-H_2 Plasmas
• Collisional Quenching of C_2(d^3Π_g) and C^3(A^1〜Π_u) and Its Application to the Estimation of Absolute Particle Density in Laser-Ablation Carbon Plumes
• Secondary Electron Ejection from Contaminated Metal Surface by He and Ar Atoms
• Observation of Stark Spectra of Argon High Rydberg States in Well-Defined Electric Fields by Laser-Induced Fluorescence-Dip Spectroscopy
• Correlation between Metastable and Ground-State Fluorine Atom Densities Measured by Laser-Induced Fluorescence and Vacuum Ultraviolet Absorption Spectroscopies : Nuclear Science, Plasmas, and Electric Discharges
• Measurements of Rotational Temperature and Density of Molecular Nitrogen in Spark-Plug Assisted Atmospheric-Pressure Microwave Discharges by Rotational Raman Scattering
• Dynamic Variation of the Sticking Coefficient of Oxygen Atoms in Helicon-Wave Excited High-Density Oxygen Plasmas
• Numerical Simulation of Elongating the Pulse Duration of a TEA CO_2 Laser
• Some Aspects of the Reproductive Biology of the Swimming Crab, Ovalipes punctatus (DE HAAN), in Sendai Bay and its Adjacent Waters
• Course of NTX changes under continuous bisphosphonate treatment in cases of NTX over-reduction due to long-term treatment with bisphosphonates
• Two-Dimensional Distributions of Ti and Ti+ Densities in High-Pressure Magnetron Sputtering Discharges
• Development of a Compact Divertor Simulator Excited by Helicon-Wave Discharge
• Fecundity of the Sakhalin Surf Clam, Spisula sachalinensis (SCHRENCK), in Sendai Bay
• Tubulointerstitial nephritis and uveitis syndrome with transient hyperthyroidism in an elderly patient
• Growth of the Sakhalin Surf Clam, Spisula sachalinensis (SCHRENCK), in Sendai Bay
• VII-1 レーザーアブレーションプラズマの作る高温高圧反応場の重要性(シンポジウムVII:レーザーアブレーションプラズマのつくる高温高圧反応場とそれによる新材料創製・加工)
• KS-2 アブレーションプラズマに関する学理と応用の融合(企画シンポジウムII : プラズマ科学分野における新しい展開)
• Spatial Distribution of H Atom Density in High-Density, Helicon-Wave H2 Plasmas Measured by Laser-Induced Fluorescence
• Measurements of Gas Temperature in High-Density Helicon-Wave H2 Plasmas by Diode Laser Absorption Spectroscopy
• Composition of Positive Ions in High-Density H2 Plasmas Measured by Time-of-Flight Mass Spectrometry
• Production of Radicals and Particulates by Interaction between High-Density Hydrogen Plasma and Graphite Plate
• Dynamic Variation of the Sticking Coefficient of Oxygen Atoms in Helicon-Wave Excited High-Density Oxygen Plasmas
• Temporal Variations in Densities of Y, Ba, and Cu Atoms in Magnetron Sputtering Plasmas with YBaCuO Target
• Dynamics of Laser-Ablation Plume and Ambient Gas Visualized by Laser-Induced Fluorescence Imaging Spectroscopy
• A Case of Nephrocalcinosis Associated with Primary Aldosteronism
• Temporal Variations in Distributions of NO and NO2 Densities in Streamer Corona Discharges
• 503 RELATIONSHIP BETWEEN CEREBROVASCULAR DISEASE AND INDOOR THERMAL ENVIRONMENT IN TWO SELECTED TOWNS IN MIYAGI PREFECTURE, JAPAN
• Formation of Positive and Negative Carbon Cluster Ions in the Initial Phase of Laser Ablation in Vacuum
• Correlation between Metastable and Ground-State Fluorine Atom Densities Measured by Laser-Induced Fluorescence and Vacuum Ultraviolet Absorption Spectroscopies

もっと見る 閉じる

スポンサーリンク