Time-of-Flight Mass Spectrometry of Positive Ions in Helicon-Wave Excited High-Density CF_4 and C_4F_8 Plasmas
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 1997-03-15
著者
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SASAKI Koichi
Department of Electronics, Nagoya University
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Suzuki Kazunari
Department of Anatomy, Tokyo Dental College
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KADOTA Kiyoshi
Department of Electronics, Nagoya University
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Suzuki Kazunari
Department Of Electronics Nagoya University:(present Address)electric Device Laboratory Fdk Corporat
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Sasaki Koichi
Department Of Electronics Nagoya University
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Kadota K
Department Of Electronics Nagoya University
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Kadota Kiyoshi
Department Of Electronics Nagoya University
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URA Kenichiro
Department of Electronics, Nagoya University
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Sasaki Koichi
Department Of Electrical Engineering And Computer Science Nagoya University
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Ura Kenichiro
Department Of Electronics Nagoya University:(present Address)device Development Center Canon Inc.
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SASAKI Koichi
Department of Architecture, Faculty of Engineering, Tohoku University
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