Measurements of Gas Temperature in High-Density Helicon-Wave H2 Plasmas by Diode Laser Absorption Spectroscopy
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概要
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The gas temperatures in high-density H2 plasmas excited by helicon-wave discharges were measured by absorption spectroscopy using a diode laser as the light source. The gas temperature was evaluated from the Doppler broadening of the absorption line profile at Hα. The gas temperature increased with rf power from 0.05 to 0.18 eV at a gas pressure of 50 mTorr. The temporal variations of the gas temperature after the initiation of discharge and the termination of the rf power were investigated. The power consumed by heating the gas was evaluated using the temperature and the time constant of the temporal variation.
- Published by the Japan Society of Applied Physics through the Institute of Pure and Applied Physicsの論文
- 2005-09-15
著者
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GOTO Motoshi
National Insitute for Fusion Science
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MORITA Shigeru
National Insitute for Fusion Science
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MUTO Sadatsugu
National Insitute for Fusion Science
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Sasaki Koichi
Department Of Electrical Engineering And Computer Science Nagoya University
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ARAMAKI Mitsutoshi
Department of Electronics, Nagoya University
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Okumura Yuji
Department of Electrical Engineering and Computer Science, Nagoya University, Nagoya 464-8603, Japan
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Aramaki Mitsutoshi
Department of Electrical Engineering and Computer Science, Nagoya University, Chikusa-ku, Nagoya 464-8603, Japan
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SASAKI Koichi
Department of Architecture, Faculty of Engineering, Tohoku University
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