Enhancement of Surface Productions of CF_x Radicals by the Addition of H_2 into CF_4 Plasmas

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概要

• 論文の詳細を見る
• 社団法人応用物理学会の論文
• 1999-08-15

著者

• SASAKI Koichi

  Department of Electronics, Nagoya University

• SUZUKI Chihiro

  Department of Neurology, Tohoku University Graduate School of Medicine

• Furukawa Hisao

  Faculty Of Engineering Science Osaka University

• 笹木 敬司

  北海道大学電子科学研究所

• FURUKAWA Hiroyuki

  Department of Organ Transplantation and Regenerative Medicine, Hokkaido University Graduate School o

• Sasaki K

  Nagoya Univ. Nagoya Jpn

• KADOTA Kiyoshi

  Department of Electronics, Nagoya University

• Furukawa Hiroyuki

  Department Of Electronics Nagoya University

• Suzuki Chihiro

  Department Of Electronics Nagoya University:(present Address)national Institute For Fusion Science

• Kadota K

  Department Of Electronics Nagoya University

• Kadota Kiyoshi

  Department Of Electronics Nagoya University

• Furukawa Hiroaki

  Department Of Electronics Nagoya University

• Sasaki Koichi

  Department Of Electrical Engineering And Computer Science Nagoya University

• Suzuki Chihiro

  Department Of Biomembrane And Biofunctional Chemistry Faculty Of Advanced Life Sciences Hokkaido Uni

• SASAKI Koichi

  Department of Architecture, Faculty of Engineering, Tohoku University

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