Sequential Single-Oriented Growth of(111)Cu/(111)HfN/(002)Hf Trilayered Film on(001)Si and Its Thermal Stability
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概要
- 論文の詳細を見る
- 社団法人応用物理学会の論文
- 2000-10-15
著者
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笹木 敬司
北海道大学電子科学研究所
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Sasaki K
Advanced Technology R&d Center Mitsubishi Electric Corporation
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SASAKI Katsutaka
Department of Materials Science, Kitami Institute of Technology
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Shinkai S
Department Of Materials Science Faculty Of Engineering Kitami Institute Of Technology
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Shinkai Satoko
Research Fellow Of The Japan Society For The Promotion Of Science
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YOSHIMOTO Ken-ichi
Department of Electrical Engineering, Asahikawa National College of Technology
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KITADA Yasuhiro
Department of Materials Science, Faculty of Engineering, Kitami Institute of Technology
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Kitada Yasuhiro
Department Of Materials Science Faculty Of Engineering Kitami Institute Of Technology
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Sasaki Katsutaka
Department Of Electrical And Electronic Engineering Faculty Of Engineering Kitami Institute Of Techn
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Yoshimoto Ken-ichi
Department Of Electrical Engineering Asahikawa National College Of Technology
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Yoshimoto Ken-ichi
Department of Electrical and Computer Engineering, Asahikawa National College of Technology, 2-2 Shunkodai, Asahikawa, Hokkaido 071-8142, Japan
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