Thermal Stability of RuO_2 Thin Films and Effects of Annealing Ambient on Their Reduction Process
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概要
- 論文の詳細を見る
RuO_2 films prepared by reactive sputtering were annealed in air and vacuum and the changes of their crystal structure, chemical binding state and resistivity were studied. In air, the RuO_2 films maintain a rutile structure below 800℃. Crystal grain growth was found above 600℃ and the minimum resistivity of 46μΩcm was obtained at 800℃. The vacuum annealing was conducted with two types of annealing systems, one using an oil diffusion pump and the other using a turbomolecular pumas the main pump. The RuO_2 films annealed in the system using the turbomolecular pump were not reduced below 500℃, however, the surface of the films was reduced as low as 200℃ in the system using the oil diffusion pump. The difference in the reduction processes was examined on the basis of the thermodynamics of RuO_2 and the influence of reducing residual gases in vacuum.
- 社団法人応用物理学会の論文
- 1999-06-15
著者
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阿部 良夫
Department Of Materials Science Kitami Institute Of Technology
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笹木 敬司
北海道大学電子科学研究所
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Abe Yuji
Advanced Technology R&d Center Mitsubishi Electric Corporation
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Abe Y
Mitsubishi Electric Corp. Hyogo Jpn
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ABE Yoshio
Department of Materials Science, Kitami Institute of Technology
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KAWAMURA Midori
Department of Materials Science, Kitami Institute of Technology
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SASAKI Katsutaka
Department of Materials Science, Kitami Institute of Technology
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KAGA Yukinao
Department of Materials Science, .Faculty of Engineering, Kitami Institute of Technology
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Kamijyo Masahiro
Department Of Materials Science Faculty Of Engineering Kitami Institute Of Technology
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Abe Yoshio
Department Of Materials Science Faculty Of Engineering Kitami Institute Of Technology
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Kaga Yukinao
Department Of Materials Science .faculty Of Engineering Kitami Institute Of Technology
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川村 みどり
Department Of Materials Science Kitami Institute Of Technology
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Sasaki Katsutaka
Department Of Electrical And Electronic Engineering Faculty Of Engineering Kitami Institute Of Techn
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Kawamura Midori
Department Of Materials Science Faculty Of Engineering Kitami Institute Of Technology
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Abe Yoshio
Department of Materials Science and Engineering, Faculty of Engineering, Kitami Institute of Technology, 165 Koen-cho, Kitami, Hokkaido 090-8507, Japan
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Kawamura Midori
Department of Materials Science and Engineering, Kitami Institute of Technology, Kitami, Hokkaido 090-8507, Japan
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