Electrical Properties of Amorphous Rh Oxide Thin Films Prepared by Reactive Sputtering
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概要
- 論文の詳細を見る
Conducting Rh oxide thin films were prepared by sputtering a Rh target in an Ar and O_2 mixed gas. Effects of the oxygen gas flow ratio on the crystallinity, chemical bonding state and resistivity were studied. Amorphous Rh_2O_3 films were prepared at an O_2 flow ratio of 20%. The Rh_2O_3 films had a relatively high resistivity of 2 mΩcm and a negative temperature coefficient of resistance (TCR) of -1000 ppm/℃, which indicated semiconducting characteristics. On the other hand, amorphous RhO_x films with a composition of 1.5 ≤ x ≤ 1.7 were prepared at O_2 flow ratios above 40%. Resistivity of these RhO_x films were 800 μΩcm and had almost no temperature dependence. Metallic conduction characteristics of RhO_2 were assumed to be revealed by the decrease in the oxygen deficiency.
- 社団法人応用物理学会の論文
- 2000-01-15
著者
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阿部 良夫
Department Of Materials Science Kitami Institute Of Technology
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笹木 敬司
北海道大学電子科学研究所
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Abe Yuji
Advanced Technology R&d Center Mitsubishi Electric Corporation
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Abe Y
Mitsubishi Electric Corp. Hyogo Jpn
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ABE Yoshio
Department of Materials Science, Kitami Institute of Technology
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KAWAMURA Midori
Department of Materials Science, Kitami Institute of Technology
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SASAKI Katsutaka
Department of Materials Science, Kitami Institute of Technology
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KATO Kiyohiko
Department of Materials Science, Faculty of Engineering, Kitami Institute of Technology
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Kamijyo Masahiro
Department Of Materials Science Faculty Of Engineering Kitami Institute Of Technology
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Abe Yoshio
Department Of Materials Science Faculty Of Engineering Kitami Institute Of Technology
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川村 みどり
Department Of Materials Science Kitami Institute Of Technology
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Sasaki Katsutaka
Department Of Electrical And Electronic Engineering Faculty Of Engineering Kitami Institute Of Techn
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Kawamura Midori
Department Of Materials Science Faculty Of Engineering Kitami Institute Of Technology
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Kato K
Department Of Materials Science Faculty Of Engineering Kitami Institute Of Technology
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Kato Kazumi
National Institute Of Advanced Industrial Science And Technology
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Abe Yoshio
Department of Materials Science and Engineering, Faculty of Engineering, Kitami Institute of Technology, 165 Koen-cho, Kitami, Hokkaido 090-8507, Japan
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Kawamura Midori
Department of Materials Science and Engineering, Kitami Institute of Technology, Kitami, Hokkaido 090-8507, Japan
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