Preparation of Low-Resistivity α-Ta Thin Films on (001) Si by Conventional DC Magnetron Sputtering
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概要
- 論文の詳細を見る
- 2003-07-15
著者
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佐々木 克孝
Department Of Materials Science Kitami Institute Of Technology
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阿部 良夫
Department Of Materials Science Kitami Institute Of Technology
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Yanagisawa H
Nhk Sci. And Technical Res. Lab. Tokyo Jpn
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Yanagisawa H
Kitami Inst. Technol. Kitami Jpn
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ABE Yoshio
Department of Materials Science, Kitami Institute of Technology
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SASAKI Katsutaka
Department of Materials Science, Kitami Institute of Technology
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SHINKAI Satoko
Department of Materials Science, Faculty of Engineering, Kitami Institute of Technology
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YANAGISAWA Hideto
Department of Electrical and Electronic Engineering, Faculty of Engineering, Kitami Institute of Tec
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SHIOJIRI Masayuki
Department of Materials Science, Faculty of Engineering, Kitami Institute of Technology
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Shinkai Satoko
Research Fellow Of The Japan Society For The Promotion Of Science
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